Fabrication of low optical losses Al2O3 layer used for Er3+-doped integrated optical amplifiers

Gan Shuyi, Taco D. Visser (Editor), Boudewijn Docter, Daan Lenstra (Editor), Hugo F. Schouten (Editor), D.J.W. Klunder, L.T.H. Hilderink, Kerstin Worhoff

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    Al2O3 is commonly used as host material for Er3+-doped integrated optical amplifiers. In this paper, a Graeco-Latin square is used in DC reactive magnetron sputtering deposition experiment in order to get low optical losses Al2O3 layer. By reasonable selection and careful arrangement of experimental parameters, an optimal combination of deposition parameters is obtained via statistic analysis with the fewest experimental runs. The result forms the base for the further fabrication of Er3+-doped Al2O3 layer. The Graeco-Latin square experiment can also be used to investigate the influence of each parameter on the deposition rate of Al2O3 layer.
    Original languageUndefined
    Number of pages4
    Publication statusPublished - 2002
    Event7th IEEE/LEOS Benelux Chapter Annual Symposium 2002 - Amsterdam, Netherlands
    Duration: 9 Dec 20029 Dec 2002
    Conference number: 7


    Conference7th IEEE/LEOS Benelux Chapter Annual Symposium 2002


    • IR-58197

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