Fabrication of low optical losses Al2O3 layer used for Er3+-doped integrated optical amplifiers

Gan Shuyi; Taco D. Visser; Boudewijn Docter; Daan Lenstra; Hugo F. Schouten; D.J.W. Klunder; L.T.H. Hilderink; Kerstin Worhoff

Fabrication of low optical losses Al2O3 layer used for Er3+-doped integrated optical amplifiers

Gan Shuyi, Taco D. Visser (Editor), Boudewijn Docter, Daan Lenstra (Editor), Hugo F. Schouten (Editor), D.J.W. Klunder, L.T.H. Hilderink, Kerstin Worhoff

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Abstract

Al2O3 is commonly used as host material for Er3+-doped integrated optical amplifiers. In this paper, a Graeco-Latin square is used in DC reactive magnetron sputtering deposition experiment in order to get low optical losses Al2O3 layer. By reasonable selection and careful arrangement of experimental parameters, an optimal combination of deposition parameters is obtained via statistic analysis with the fewest experimental runs. The result forms the base for the further fabrication of Er3+-doped Al2O3 layer. The Graeco-Latin square experiment can also be used to investigate the influence of each parameter on the deposition rate of Al2O3 layer.

Original language	Undefined
Pages	258-261
Number of pages	4
Publication status	Published - 2002
Event	7th IEEE/LEOS Benelux Chapter Annual Symposium 2002 - Amsterdam, Netherlands Duration: 9 Dec 2002 → 9 Dec 2002 Conference number: 7

Conference

Conference	7th IEEE/LEOS Benelux Chapter Annual Symposium 2002
Country/Territory	Netherlands
City	Amsterdam
Period	9/12/02 → 9/12/02

Keywords

IR-58197

Access to Document

Shuyi02fabrication

Cite this

@conference{a97d6d9389014cab88ca47b96577c1fb,

title = "Fabrication of low optical losses Al2O3 layer used for Er3+-doped integrated optical amplifiers",

abstract = "Al2O3 is commonly used as host material for Er3+-doped integrated optical amplifiers. In this paper, a Graeco-Latin square is used in DC reactive magnetron sputtering deposition experiment in order to get low optical losses Al2O3 layer. By reasonable selection and careful arrangement of experimental parameters, an optimal combination of deposition parameters is obtained via statistic analysis with the fewest experimental runs. The result forms the base for the further fabrication of Er3+-doped Al2O3 layer. The Graeco-Latin square experiment can also be used to investigate the influence of each parameter on the deposition rate of Al2O3 layer.",

keywords = "IR-58197",

author = "Gan Shuyi and Visser, {Taco D.} and Boudewijn Docter and Daan Lenstra and Schouten, {Hugo F.} and D.J.W. Klunder and L.T.H. Hilderink and Kerstin Worhoff",

year = "2002",

language = "Undefined",

pages = "258--261",

note = "7th IEEE/LEOS Benelux Chapter Annual Symposium 2002 ; Conference date: 09-12-2002 Through 09-12-2002",

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TY - CONF

T1 - Fabrication of low optical losses Al2O3 layer used for Er3+-doped integrated optical amplifiers

AU - Shuyi, Gan

AU - Docter, Boudewijn

AU - Klunder, D.J.W.

AU - Hilderink, L.T.H.

AU - Worhoff, Kerstin

A2 - Visser, Taco D.

A2 - Lenstra, Daan

A2 - Schouten, Hugo F.

N1 - Conference code: 7

PY - 2002

Y1 - 2002

N2 - Al2O3 is commonly used as host material for Er3+-doped integrated optical amplifiers. In this paper, a Graeco-Latin square is used in DC reactive magnetron sputtering deposition experiment in order to get low optical losses Al2O3 layer. By reasonable selection and careful arrangement of experimental parameters, an optimal combination of deposition parameters is obtained via statistic analysis with the fewest experimental runs. The result forms the base for the further fabrication of Er3+-doped Al2O3 layer. The Graeco-Latin square experiment can also be used to investigate the influence of each parameter on the deposition rate of Al2O3 layer.

AB - Al2O3 is commonly used as host material for Er3+-doped integrated optical amplifiers. In this paper, a Graeco-Latin square is used in DC reactive magnetron sputtering deposition experiment in order to get low optical losses Al2O3 layer. By reasonable selection and careful arrangement of experimental parameters, an optimal combination of deposition parameters is obtained via statistic analysis with the fewest experimental runs. The result forms the base for the further fabrication of Er3+-doped Al2O3 layer. The Graeco-Latin square experiment can also be used to investigate the influence of each parameter on the deposition rate of Al2O3 layer.

KW - IR-58197

M3 - Paper

SP - 258

EP - 261

T2 - 7th IEEE/LEOS Benelux Chapter Annual Symposium 2002

Y2 - 9 December 2002 through 9 December 2002

ER -