Fabrication of mechano-optical sensors for hydrogen gas

P.V.S. Pham Van So; L.J. Kauppinen; Mindert Dijkstra; Hendricus A.G.M. van Wolferen; R.M. de Ridder; Hugo Hoekstra

Fabrication of mechano-optical sensors for hydrogen gas

P.V.S. Pham Van So, L.J. Kauppinen, Mindert Dijkstra, Hendricus A.G.M. van Wolferen, R.M. de Ridder, Hugo Hoekstra

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

45 Downloads (Pure)

Abstract

We present results related to the fabrication of a novel and highly sensitive mechano-optical sensor for hydrogen gas, based on microcantilevers, supplied with a selective gas absorbing layer (Pd), suspended above a Si3N4 grated waveguide (GWG). Integrated microcantilever-GWG devices have been fabricated successfully using MEMS techniques. Several technical problems encountered during the preparation of such integrated devices (i.e., grating production, surface roughness, facet quality) will be discussed and solutions to address these issues will be given as well.

Original language	Undefined
Title of host publication	Annual Workshop on Semiconductor Advances for Future Electronics and Sensors (SAFE)
Place of Publication	Veldhoven
Publisher	STW
Pages	44-47
Number of pages	4
ISBN (Print)	978-90-73461-62-8
Publication status	Published - 27 Nov 2009
Event	12th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE 2009 - Veldhoven, Netherlands Duration: 26 Nov 2009 → 27 Nov 2009 Conference number: 12

Publication series

Name
Publisher	STW

Conference

Conference	12th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE 2009
Abbreviated title	SAFE
Country/Territory	Netherlands
City	Veldhoven
Period	26/11/09 → 27/11/09

Keywords

IR-69982
EWI-17449
IOMS-SNS: SENSORS
METIS-268935

Access to Document

eprints_SAFE

http://www.stw.nl/Programmas/Safe/

Cite this

@inproceedings{6de3b2386d534e3eacb345d4b51edd28,

title = "Fabrication of mechano-optical sensors for hydrogen gas",

abstract = "We present results related to the fabrication of a novel and highly sensitive mechano-optical sensor for hydrogen gas, based on microcantilevers, supplied with a selective gas absorbing layer (Pd), suspended above a Si3N4 grated waveguide (GWG). Integrated microcantilever-GWG devices have been fabricated successfully using MEMS techniques. Several technical problems encountered during the preparation of such integrated devices (i.e., grating production, surface roughness, facet quality) will be discussed and solutions to address these issues will be given as well.",

keywords = "IR-69982, EWI-17449, IOMS-SNS: SENSORS, METIS-268935",

author = "{Pham Van So}, P.V.S. and L.J. Kauppinen and Mindert Dijkstra and {van Wolferen}, {Hendricus A.G.M.} and {de Ridder}, R.M. and Hugo Hoekstra",

year = "2009",

month = nov,

day = "27",

language = "Undefined",

isbn = "978-90-73461-62-8",

publisher = "STW",

pages = "44--47",

booktitle = "Annual Workshop on Semiconductor Advances for Future Electronics and Sensors (SAFE)",

note = "12th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE 2009 ; Conference date: 26-11-2009 Through 27-11-2009",

}

Pham Van So, PVS, Kauppinen, LJ, Dijkstra, M, van Wolferen, HAGM, de Ridder, RM & Hoekstra, H 2009, Fabrication of mechano-optical sensors for hydrogen gas. in Annual Workshop on Semiconductor Advances for Future Electronics and Sensors (SAFE). STW, Veldhoven, pp. 44-47, 12th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE 2009, Veldhoven, Netherlands, 26/11/09. <http://www.stw.nl/Programmas/Safe/>

TY - GEN

T1 - Fabrication of mechano-optical sensors for hydrogen gas

AU - Pham Van So, P.V.S.

AU - Kauppinen, L.J.

AU - Dijkstra, Mindert

AU - van Wolferen, Hendricus A.G.M.

AU - de Ridder, R.M.

AU - Hoekstra, Hugo

N1 - Conference code: 12

PY - 2009/11/27

Y1 - 2009/11/27

N2 - We present results related to the fabrication of a novel and highly sensitive mechano-optical sensor for hydrogen gas, based on microcantilevers, supplied with a selective gas absorbing layer (Pd), suspended above a Si3N4 grated waveguide (GWG). Integrated microcantilever-GWG devices have been fabricated successfully using MEMS techniques. Several technical problems encountered during the preparation of such integrated devices (i.e., grating production, surface roughness, facet quality) will be discussed and solutions to address these issues will be given as well.

AB - We present results related to the fabrication of a novel and highly sensitive mechano-optical sensor for hydrogen gas, based on microcantilevers, supplied with a selective gas absorbing layer (Pd), suspended above a Si3N4 grated waveguide (GWG). Integrated microcantilever-GWG devices have been fabricated successfully using MEMS techniques. Several technical problems encountered during the preparation of such integrated devices (i.e., grating production, surface roughness, facet quality) will be discussed and solutions to address these issues will be given as well.

KW - IR-69982

KW - EWI-17449

KW - IOMS-SNS: SENSORS

KW - METIS-268935

M3 - Conference contribution

SN - 978-90-73461-62-8

SP - 44

EP - 47

BT - Annual Workshop on Semiconductor Advances for Future Electronics and Sensors (SAFE)

PB - STW

CY - Veldhoven

T2 - 12th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE 2009

Y2 - 26 November 2009 through 27 November 2009

ER -