Fabrication of mechano-optical sensors for hydrogen gas

P.V.S. Pham Van So, L.J. Kauppinen, Mindert Dijkstra, Hendricus A.G.M. van Wolferen, R.M. de Ridder, Hugo Hoekstra

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    Abstract

    We present results related to the fabrication of a novel and highly sensitive mechano-optical sensor for hydrogen gas, based on microcantilevers, supplied with a selective gas absorbing layer (Pd), suspended above a Si3N4 grated waveguide (GWG). Integrated microcantilever-GWG devices have been fabricated successfully using MEMS techniques. Several technical problems encountered during the preparation of such integrated devices (i.e., grating production, surface roughness, facet quality) will be discussed and solutions to address these issues will be given as well.
    Original languageUndefined
    Title of host publicationAnnual Workshop on Semiconductor Advances for Future Electronics and Sensors (SAFE)
    Place of PublicationVeldhoven
    PublisherSTW
    Pages44-47
    Number of pages4
    ISBN (Print)978-90-73461-62-8
    Publication statusPublished - 27 Nov 2009
    Event12th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE 2009 - Veldhoven, Netherlands
    Duration: 26 Nov 200927 Nov 2009
    Conference number: 12

    Publication series

    Name
    PublisherSTW

    Conference

    Conference12th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE 2009
    Abbreviated titleSAFE
    CountryNetherlands
    CityVeldhoven
    Period26/11/0927/11/09

    Keywords

    • IR-69982
    • EWI-17449
    • IOMS-SNS: SENSORS
    • METIS-268935

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