Fabrication of microcantilever-based IO grated waveguide sensors for detection of nano-displacements

P.V.S. Pham Van So, L.J. Kauppinen, Hugo Hoekstra, Marcel Dijkstra, Mindert Dijkstra, Hendricus A.G.M. van Wolferen, Gijsbertus J.M. Krijnen, R.M. de Ridder

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    Abstract

    We propose a novel and highly sensitive integrated read-out scheme, capable of detecting sub-nanometre deflections of a cantilever in close proximity to a grated waveguide structure. A very compact and stable sensor element can be realized by monolithically integrating a microcantilever structure with the grated waveguide (GWG), using conventional layer deposition and sacrificial layer etching techniques. The platform integrating a high quality GWG and a low initial bending cantilever has been fabricated and characterized.
    Original languageUndefined
    Title of host publicationProceedings of the 13th Annual Symposium of the IEEE LEOS Benelux Chapter
    EditorsKerstin Worhoff, L. Agazzi, N. Ismail, X Leijtens
    Place of PublicationEnschede, The Netherlands
    PublisherIEEE/LEOS Benelux Chapter
    Pages155-158
    Number of pages4
    ISBN (Print)978-90-365-2768-2
    Publication statusPublished - 27 Nov 2008
    Event13th Annual Symposium of the IEEE/LEOS Benelux Chapter 2008 - Enschede, Netherlands
    Duration: 27 Nov 200828 Nov 2008
    Conference number: 13

    Publication series

    Name
    PublisherIEEE Photonics Society

    Conference

    Conference13th Annual Symposium of the IEEE/LEOS Benelux Chapter 2008
    CountryNetherlands
    CityEnschede
    Period27/11/0828/11/08

    Keywords

    • IOMS-SNS: SENSORS
    • METIS-256138
    • IR-65280
    • EWI-14834

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