Fabrication of microcantilever-based IO grated waveguide sensors for detection of nano-displacements

P.V.S. Pham Van So; L.J. Kauppinen; Hugo Hoekstra; Marcel Dijkstra; Mindert Dijkstra; Hendricus A.G.M. van Wolferen; Gijsbertus J.M. Krijnen; R.M. de Ridder

Fabrication of microcantilever-based IO grated waveguide sensors for detection of nano-displacements

P.V.S. Pham Van So, L.J. Kauppinen, Hugo Hoekstra, Marcel Dijkstra, Mindert Dijkstra, Hendricus A.G.M. van Wolferen, Gijsbertus J.M. Krijnen, R.M. de Ridder

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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Abstract

We propose a novel and highly sensitive integrated read-out scheme, capable of detecting sub-nanometre deflections of a cantilever in close proximity to a grated waveguide structure. A very compact and stable sensor element can be realized by monolithically integrating a microcantilever structure with the grated waveguide (GWG), using conventional layer deposition and sacrificial layer etching techniques. The platform integrating a high quality GWG and a low initial bending cantilever has been fabricated and characterized.

Original language	Undefined
Title of host publication	Proceedings of the 13th Annual Symposium of the IEEE LEOS Benelux Chapter
Editors	Kerstin Worhoff, L. Agazzi, N. Ismail, X Leijtens
Place of Publication	Enschede, The Netherlands
Publisher	IEEE
Pages	155-158
Number of pages	4
ISBN (Print)	978-90-365-2768-2
Publication status	Published - 27 Nov 2008
Event	13th Annual Symposium of the IEEE/LEOS Benelux Chapter 2008 - Enschede, Netherlands Duration: 27 Nov 2008 → 28 Nov 2008 Conference number: 13

Publication series

Name
Publisher	IEEE Photonics Society

Conference

Conference	13th Annual Symposium of the IEEE/LEOS Benelux Chapter 2008
Country/Territory	Netherlands
City	Enschede
Period	27/11/08 → 28/11/08

Keywords

IOMS-SNS: SENSORS
METIS-256138
IR-65280
EWI-14834

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Cite this

Pham Van So, P. V. S., Kauppinen, L. J., Hoekstra, H., Dijkstra, M., Dijkstra, M., van Wolferen, H. A. G. M., Krijnen, G. J. M., & de Ridder, R. M. (2008). Fabrication of microcantilever-based IO grated waveguide sensors for detection of nano-displacements. In K. Worhoff, L. Agazzi, N. Ismail, & X. Leijtens (Eds.), Proceedings of the 13th Annual Symposium of the IEEE LEOS Benelux Chapter (pp. 155-158). IEEE.

@inproceedings{cebe910803674734b1f3da225bc5ff31,

title = "Fabrication of microcantilever-based IO grated waveguide sensors for detection of nano-displacements",

abstract = "We propose a novel and highly sensitive integrated read-out scheme, capable of detecting sub-nanometre deflections of a cantilever in close proximity to a grated waveguide structure. A very compact and stable sensor element can be realized by monolithically integrating a microcantilever structure with the grated waveguide (GWG), using conventional layer deposition and sacrificial layer etching techniques. The platform integrating a high quality GWG and a low initial bending cantilever has been fabricated and characterized.",

keywords = "IOMS-SNS: SENSORS, METIS-256138, IR-65280, EWI-14834",

author = "{Pham Van So}, P.V.S. and L.J. Kauppinen and Hugo Hoekstra and Marcel Dijkstra and Mindert Dijkstra and {van Wolferen}, {Hendricus A.G.M.} and Krijnen, {Gijsbertus J.M.} and {de Ridder}, R.M.",

year = "2008",

month = nov,

day = "27",

language = "Undefined",

isbn = "978-90-365-2768-2",

publisher = "IEEE",

pages = "155--158",

editor = "Kerstin Worhoff and L. Agazzi and N. Ismail and X Leijtens",

booktitle = "Proceedings of the 13th Annual Symposium of the IEEE LEOS Benelux Chapter",

address = "United States",

note = "13th Annual Symposium of the IEEE/LEOS Benelux Chapter 2008 ; Conference date: 27-11-2008 Through 28-11-2008",

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Pham Van So, PVS, Kauppinen, LJ, Hoekstra, H, Dijkstra, M, Dijkstra, M, van Wolferen, HAGM, Krijnen, GJM & de Ridder, RM 2008, Fabrication of microcantilever-based IO grated waveguide sensors for detection of nano-displacements. in K Worhoff, L Agazzi, N Ismail & X Leijtens (eds), Proceedings of the 13th Annual Symposium of the IEEE LEOS Benelux Chapter. IEEE, Enschede, The Netherlands, pp. 155-158, 13th Annual Symposium of the IEEE/LEOS Benelux Chapter 2008, Enschede, Netherlands, 27/11/08.

Fabrication of microcantilever-based IO grated waveguide sensors for detection of nano-displacements. / Pham Van So, P.V.S.; Kauppinen, L.J.; Hoekstra, Hugo et al.
Proceedings of the 13th Annual Symposium of the IEEE LEOS Benelux Chapter. ed. / Kerstin Worhoff; L. Agazzi; N. Ismail; X Leijtens. Enschede, The Netherlands: IEEE, 2008. p. 155-158.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Fabrication of microcantilever-based IO grated waveguide sensors for detection of nano-displacements

AU - Pham Van So, P.V.S.

AU - Kauppinen, L.J.

AU - Hoekstra, Hugo

AU - Dijkstra, Marcel

AU - Dijkstra, Mindert

AU - van Wolferen, Hendricus A.G.M.

AU - Krijnen, Gijsbertus J.M.

AU - de Ridder, R.M.

N1 - Conference code: 13

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N2 - We propose a novel and highly sensitive integrated read-out scheme, capable of detecting sub-nanometre deflections of a cantilever in close proximity to a grated waveguide structure. A very compact and stable sensor element can be realized by monolithically integrating a microcantilever structure with the grated waveguide (GWG), using conventional layer deposition and sacrificial layer etching techniques. The platform integrating a high quality GWG and a low initial bending cantilever has been fabricated and characterized.

AB - We propose a novel and highly sensitive integrated read-out scheme, capable of detecting sub-nanometre deflections of a cantilever in close proximity to a grated waveguide structure. A very compact and stable sensor element can be realized by monolithically integrating a microcantilever structure with the grated waveguide (GWG), using conventional layer deposition and sacrificial layer etching techniques. The platform integrating a high quality GWG and a low initial bending cantilever has been fabricated and characterized.

KW - IOMS-SNS: SENSORS

KW - METIS-256138

KW - IR-65280

KW - EWI-14834

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BT - Proceedings of the 13th Annual Symposium of the IEEE LEOS Benelux Chapter

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Pham Van So PVS, Kauppinen LJ, Hoekstra H, Dijkstra M, Dijkstra M, van Wolferen HAGM et al. Fabrication of microcantilever-based IO grated waveguide sensors for detection of nano-displacements. In Worhoff K, Agazzi L, Ismail N, Leijtens X, editors, Proceedings of the 13th Annual Symposium of the IEEE LEOS Benelux Chapter. Enschede, The Netherlands: IEEE. 2008. p. 155-158