Fabrication of micromachined fountain pen with in situ characterization possibility of nanoscale surface modification

Research output: Contribution to journalArticleAcademicpeer-review

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Abstract

We present the fabrication process of a tool that can be used in standard atomic force microscope (AFM) for in situ characterization of chemical, chemical–mechanical or physical surface modification performed with the same device. The image obtained during scanning contains information about the modified and unmodified topographies for each scanning line, thus quantification of surface topography modification (e.g. wear, deposition) or the change of different parameters (e.g. friction force) can be followed as it occurs. The device allows continuous fluid supply for different localized applications. The reservoir, micromachined into the AFM probe support, is connected to fluidic channels embedded in a V-shaped cantilever. Via the fluidic channels the liquid reaches the tip, where surface modification occurs. With a second cantilever, used only for measurement, the surface modification is characterized in situ. Due to multiple functionality of the device the applications range from nanoscale tribological studies (lubricated and dry conditions) to lithography (deposition, etching).
Original languageUndefined
Pages (from-to)528-534
Number of pages7
JournalJournal of micromechanics and microengineering
Volume15
Issue number15
DOIs
Publication statusPublished - 3 Mar 2005

Keywords

  • EWI-9796
  • IR-54364
  • METIS-228456

Cite this

@article{69a43e77863c4317bb290674daa59314,
title = "Fabrication of micromachined fountain pen with in situ characterization possibility of nanoscale surface modification",
abstract = "We present the fabrication process of a tool that can be used in standard atomic force microscope (AFM) for in situ characterization of chemical, chemical–mechanical or physical surface modification performed with the same device. The image obtained during scanning contains information about the modified and unmodified topographies for each scanning line, thus quantification of surface topography modification (e.g. wear, deposition) or the change of different parameters (e.g. friction force) can be followed as it occurs. The device allows continuous fluid supply for different localized applications. The reservoir, micromachined into the AFM probe support, is connected to fluidic channels embedded in a V-shaped cantilever. Via the fluidic channels the liquid reaches the tip, where surface modification occurs. With a second cantilever, used only for measurement, the surface modification is characterized in situ. Due to multiple functionality of the device the applications range from nanoscale tribological studies (lubricated and dry conditions) to lithography (deposition, etching).",
keywords = "EWI-9796, IR-54364, METIS-228456",
author = "S. Deladi and Berenschot, {Johan W.} and Tas, {Niels Roelof} and {de Boer}, {Meint J.} and {de Boer}, J.H. and Krijnen, {Gijsbertus J.M.} and Elwenspoek, {Michael Curt}",
year = "2005",
month = "3",
day = "3",
doi = "10.1088/0960-1317/15/3/013",
language = "Undefined",
volume = "15",
pages = "528--534",
journal = "Journal of micromechanics and microengineering",
issn = "0960-1317",
publisher = "IOP Publishing Ltd.",
number = "15",

}

Fabrication of micromachined fountain pen with in situ characterization possibility of nanoscale surface modification. / Deladi, S.; Berenschot, Johan W.; Tas, Niels Roelof; de Boer, Meint J.; de Boer, J.H.; Krijnen, Gijsbertus J.M.; Elwenspoek, Michael Curt.

In: Journal of micromechanics and microengineering, Vol. 15, No. 15, 03.03.2005, p. 528-534.

Research output: Contribution to journalArticleAcademicpeer-review

TY - JOUR

T1 - Fabrication of micromachined fountain pen with in situ characterization possibility of nanoscale surface modification

AU - Deladi, S.

AU - Berenschot, Johan W.

AU - Tas, Niels Roelof

AU - de Boer, Meint J.

AU - de Boer, J.H.

AU - Krijnen, Gijsbertus J.M.

AU - Elwenspoek, Michael Curt

PY - 2005/3/3

Y1 - 2005/3/3

N2 - We present the fabrication process of a tool that can be used in standard atomic force microscope (AFM) for in situ characterization of chemical, chemical–mechanical or physical surface modification performed with the same device. The image obtained during scanning contains information about the modified and unmodified topographies for each scanning line, thus quantification of surface topography modification (e.g. wear, deposition) or the change of different parameters (e.g. friction force) can be followed as it occurs. The device allows continuous fluid supply for different localized applications. The reservoir, micromachined into the AFM probe support, is connected to fluidic channels embedded in a V-shaped cantilever. Via the fluidic channels the liquid reaches the tip, where surface modification occurs. With a second cantilever, used only for measurement, the surface modification is characterized in situ. Due to multiple functionality of the device the applications range from nanoscale tribological studies (lubricated and dry conditions) to lithography (deposition, etching).

AB - We present the fabrication process of a tool that can be used in standard atomic force microscope (AFM) for in situ characterization of chemical, chemical–mechanical or physical surface modification performed with the same device. The image obtained during scanning contains information about the modified and unmodified topographies for each scanning line, thus quantification of surface topography modification (e.g. wear, deposition) or the change of different parameters (e.g. friction force) can be followed as it occurs. The device allows continuous fluid supply for different localized applications. The reservoir, micromachined into the AFM probe support, is connected to fluidic channels embedded in a V-shaped cantilever. Via the fluidic channels the liquid reaches the tip, where surface modification occurs. With a second cantilever, used only for measurement, the surface modification is characterized in situ. Due to multiple functionality of the device the applications range from nanoscale tribological studies (lubricated and dry conditions) to lithography (deposition, etching).

KW - EWI-9796

KW - IR-54364

KW - METIS-228456

U2 - 10.1088/0960-1317/15/3/013

DO - 10.1088/0960-1317/15/3/013

M3 - Article

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SP - 528

EP - 534

JO - Journal of micromechanics and microengineering

JF - Journal of micromechanics and microengineering

SN - 0960-1317

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