Fabrication of micromachined pipettes in a flow channel for single molecule handling of DNA

C.R. Rusu, Ronny van 't Oever, Meint J. de Boer, Henricus V. Jansen, Johan W. Berenschot, Martin L. Bennink, Johannes S. Kanger, B.G. de Grooth, Michael Curt Elwenspoek, Jan Greve, Albert van den Berg, J.P. Brugger

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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We have developed a micromachined flow cell consisting of a flow channel integrated with micropipettes. The flow cell is used in combination with an optical trap set-up (optical tweezers) to study mechanical and structural properties of λ-DNA molecules. The flow cell was realized using silicon micromachining including the so-called buried channel technology to fabricate the micropipettes, the wet etching of glass to create the flow channel, and the powder blasting of glass to make the fluid connections. The volume of the flow cell is 2 µl. The pipettes have a length of 130 µm, a width of 5-10 µm, a round opening of 1 µm and can be processed with different shapes. Using this flow cell we stretched single molecules (λ-DNA) showing typical force-extension curves also found with conventional techniques. These pipettes can be also used for drug delivery, for injection of small gas bubbles into a liquid flow to monitor the streamlines, and for the mixing of two liquids to study diffusion effects. The paper describes the design, the fabrication and testing of the flow cell.
Original languageUndefined
Title of host publicationProceedings of the IEEE Micro Electro Mechanical Systems (MEMS)
Place of PublicationPiscataway
Number of pages6
ISBN (Print)0-7803-5273-4
Publication statusPublished - 23 Jan 2000
Event13th Annual International Conference on Micro Electro Mechanical Systems, MEMS 2000 - Miyazaki, Japan
Duration: 23 Jan 200027 Jan 2000
Conference number: 13

Publication series



Conference13th Annual International Conference on Micro Electro Mechanical Systems, MEMS 2000
Abbreviated titleMEMS


  • METIS-113067
  • EWI-13168
  • IR-16182

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