Fabrication of micron-sized tetrahedra by Si〈1 1 1〉 micromachining and retraction edge lithography

Rajeevan Kozhummal, Johan W. Berenschot, Henricus V. Jansen, Niels Roelof Tas, Margit Zacharias, Michael Curt Elwenspoek

    Research output: Contribution to journal › Article › Academic › peer-review

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