Fabrication of microsieves with sub-micron pore size by laser interference lithography

S. Kuiper, Hendricus A.G.M. van Wolferen, C.J.M. van Rijn, W. Nijdam, Gijsbertus J.M. Krijnen, Michael Curt Elwenspoek

    Research output: Contribution to journalArticleAcademicpeer-review

    Original languageUndefined
    Pages (from-to)33-37
    JournalJournal of micromechanics and microengineering
    Issue number11
    Publication statusPublished - 2001


    • METIS-111711

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