Fabrication of microsieves with sub-micron pore size by laser interference lithography

S. Kuiper; Hendricus A.G.M. van Wolferen; C.J.M. van Rijn; W. Nijdam; Gijsbertus J.M. Krijnen; Michael Curt Elwenspoek

Fabrication of microsieves with sub-micron pore size by laser interference lithography

S. Kuiper, Hendricus A.G.M. van Wolferen, C.J.M. van Rijn, W. Nijdam, Gijsbertus J.M. Krijnen, Michael Curt Elwenspoek

Research output: Contribution to journal › Article › Academic › peer-review

Original language	Undefined
Pages (from-to)	33-37
Journal	Journal of micromechanics and microengineering
Issue number	11
Publication status	Published - 2001

Keywords

METIS-111711

Cite this

@article{fa62ac8f04234d3ea416b23b7e5763ba,

title = "Fabrication of microsieves with sub-micron pore size by laser interference lithography",

keywords = "METIS-111711",

author = "S. Kuiper and {van Wolferen}, {Hendricus A.G.M.} and {van Rijn}, C.J.M. and W. Nijdam and Krijnen, {Gijsbertus J.M.} and Elwenspoek, {Michael Curt}",

year = "2001",

language = "Undefined",

pages = "33--37",

journal = "Journal of micromechanics and microengineering",

issn = "0960-1317",

publisher = "Institute of Physics (IOP)",

number = "11",

}

TY - JOUR

T1 - Fabrication of microsieves with sub-micron pore size by laser interference lithography

AU - Kuiper, S.

AU - van Wolferen, Hendricus A.G.M.

AU - van Rijn, C.J.M.

AU - Nijdam, W.

AU - Krijnen, Gijsbertus J.M.

AU - Elwenspoek, Michael Curt

PY - 2001

Y1 - 2001

KW - METIS-111711

M3 - Article

SN - 0960-1317

SP - 33

EP - 37

JO - Journal of micromechanics and microengineering

JF - Journal of micromechanics and microengineering

IS - 11

ER -