Fabrication of microstructures by powder blasting

H. Wensink

    Research output: ThesisPhD Thesis - Research UT, graduation UT

    269 Downloads (Pure)


    This thesis deals with the use of powder blasting as a micromachining technique to create micro systems. Powder blasting is a technology in which small particles, accelerated by an air jet, are directed towards a brittle target for mechanical material removal. It is especially useful for glass machining due to the limitations of other glass micromachining techniques.
    Original languageUndefined
    • Elwenspoek, Michael Curt, Supervisor
    Thesis sponsors
    Award date22 Feb 2002
    Place of PublicationEnschede
    Print ISBNs90-365-1698-6
    Publication statusPublished - 22 Feb 2002


    • METIS-205458
    • IR-61698
    • EWI-14547

    Cite this