This thesis deals with the use of powder blasting as a micromachining technique to create micro systems. Powder blasting is a technology in which small particles, accelerated by an air jet, are directed towards a brittle target for mechanical material removal. It is especially useful for glass machining due to the limitations of other glass micromachining techniques.
|Award date||22 Feb 2002|
|Place of Publication||Enschede|
|Publication status||Published - 22 Feb 2002|