Fabrication of microstructures by powder blasting

H. Wensink

    Research output: ThesisPhD Thesis - Research UT, graduation UT

    269 Downloads (Pure)

    Abstract

    This thesis deals with the use of powder blasting as a micromachining technique to create micro systems. Powder blasting is a technology in which small particles, accelerated by an air jet, are directed towards a brittle target for mechanical material removal. It is especially useful for glass machining due to the limitations of other glass micromachining techniques.
    Original languageUndefined
    Supervisors/Advisors
    • Elwenspoek, Michael Curt, Supervisor
    Thesis sponsors
    Award date22 Feb 2002
    Place of PublicationEnschede
    Publisher
    Print ISBNs90-365-1698-6
    Publication statusPublished - 22 Feb 2002

    Keywords

    • METIS-205458
    • IR-61698
    • EWI-14547

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