Fabrication of microstructures by powder blasting

H. Wensink

Fabrication of microstructures by powder blasting

H. Wensink

Research output: Thesis › PhD Thesis - Research UT, graduation UT

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Abstract

This thesis deals with the use of powder blasting as a micromachining technique to create micro systems. Powder blasting is a technology in which small particles, accelerated by an air jet, are directed towards a brittle target for mechanical material removal. It is especially useful for glass machining due to the limitations of other glass micromachining techniques.

Original language	Undefined
Supervisors/Advisors	Elwenspoek, Michael Curt, Supervisor
Thesis sponsors	Nederlandse Organisatie voor Wetenschappelijk Onderzoek (NWO)
Award date	22 Feb 2002
Place of Publication	Enschede
Publisher	University of Twente
Print ISBNs	90-365-1698-6
Publication status	Published - 22 Feb 2002

Keywords

METIS-205458
IR-61698
EWI-14547

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Cite this

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title = "Fabrication of microstructures by powder blasting",

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year = "2002",

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day = "22",

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AU - Wensink, H.

PY - 2002/2/22

Y1 - 2002/2/22

N2 - This thesis deals with the use of powder blasting as a micromachining technique to create micro systems. Powder blasting is a technology in which small particles, accelerated by an air jet, are directed towards a brittle target for mechanical material removal. It is especially useful for glass machining due to the limitations of other glass micromachining techniques.

AB - This thesis deals with the use of powder blasting as a micromachining technique to create micro systems. Powder blasting is a technology in which small particles, accelerated by an air jet, are directed towards a brittle target for mechanical material removal. It is especially useful for glass machining due to the limitations of other glass micromachining techniques.

KW - METIS-205458

KW - IR-61698

KW - EWI-14547

M3 - PhD Thesis - Research UT, graduation UT

SN - 90-365-1698-6

PB - University of Twente

CY - Enschede

ER -