Abstract
This thesis deals with the use of powder blasting as a micromachining technique to create micro systems. Powder blasting is a technology in which small particles, accelerated by an air jet, are directed towards a brittle target for mechanical material removal. It is especially useful for glass machining due to the limitations of other glass micromachining techniques.
Original language | Undefined |
---|---|
Supervisors/Advisors |
|
Thesis sponsors | |
Award date | 22 Feb 2002 |
Place of Publication | Enschede |
Publisher | |
Print ISBNs | 90-365-1698-6 |
Publication status | Published - 22 Feb 2002 |
Keywords
- METIS-205458
- IR-61698
- EWI-14547