Fabrication of multi electrode array structures for intra-neural stimulation: assessment of the LIGA method

Jeroen A. Bielen, Andreas W. Schmidt, Rolf Weiel, Wim L.C. Rutten

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    Abstract

    The fabrication of the basic structure of needle electrode arrays by means of the LIGA method is investigated. To be able to contact all needle electrodes individually, the arrays were fabricated on silicon wafers with a patterned interconnection layer. Though further improvement of the process is needed to increase yield of the very slim structures, this approach shows the feasibility of combining LIGA with silicon technology, thereby offering a useful tool for the fabrication of neural prostheses
    Original languageEnglish
    Title of host publicationProceedings of the 18th Annual International Conference of the IEEE Engineering in Medicine and Biology Society 1996
    Place of PublicationPiscataway, NJ
    PublisherIEEE
    Pages268-269
    Number of pages2
    Volume1
    ISBN (Print)0-7803-3811-1
    DOIs
    Publication statusPublished - 31 Oct 1996
    Event18th Annual International Conference of the IEEE Engineering in Medicine and Biology Society, EMBC 1996: Bridging Disciplines for Biomedicine - Amsterdam, Netherlands
    Duration: 31 Oct 19963 Nov 1996
    Conference number: 18

    Conference

    Conference18th Annual International Conference of the IEEE Engineering in Medicine and Biology Society, EMBC 1996
    Abbreviated titleEMBC
    CountryNetherlands
    CityAmsterdam
    Period31/10/963/11/96

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