Abstract
The fabrication of the basic structure of needle electrode arrays by means of the LIGA method is investigated. To be able to contact all needle electrodes individually, the arrays were fabricated on silicon wafers with a patterned interconnection layer. Though further improvement of the process is needed to increase yield of the very slim structures, this approach shows the feasibility of combining LIGA with silicon technology, thereby offering a useful tool for the fabrication of neural prostheses
Original language | English |
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Title of host publication | Proceedings of the 18th Annual International Conference of the IEEE Engineering in Medicine and Biology Society 1996 |
Place of Publication | Piscataway, NJ |
Publisher | IEEE |
Pages | 268-269 |
Number of pages | 2 |
Volume | 1 |
ISBN (Print) | 0-7803-3811-1 |
DOIs | |
Publication status | Published - 31 Oct 1996 |
Event | 18th Annual International Conference of the IEEE Engineering in Medicine and Biology Society, EMBC 1996: Bridging Disciplines for Biomedicine - Amsterdam, Netherlands Duration: 31 Oct 1996 → 3 Nov 1996 Conference number: 18 |
Conference
Conference | 18th Annual International Conference of the IEEE Engineering in Medicine and Biology Society, EMBC 1996 |
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Abbreviated title | EMBC |
Country/Territory | Netherlands |
City | Amsterdam |
Period | 31/10/96 → 3/11/96 |