Fabrication of multi electrode array structures for intra-neural stimulation: assessment of the LIGA method

J.A. Bielen, J.A. Bielen, A.W. Schmidt, R. Weiel, Wim Rutten

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

5 Citations (Scopus)
50 Downloads (Pure)

Abstract

The fabrication of the basic structure of needle electrode arrays by means of the LIGA method is investigated. To be able to contact all needle electrodes individually, the arrays were fabricated on silicon wafers with a patterned interconnection layer. Though further improvement of the process is needed to increase yield of the very slim structures, this approach shows the feasibility of combining LIGA with silicon technology, thereby offering a useful tool for the fabrication of neural prostheses
Original languageUndefined
Title of host publicationConference Proceedings 1996 IEEE Engineering in medicine and Biology 18th Annual International Conference
Place of PublicationAmsterdam
PublisherIEEE
Pages-
Number of pages2
ISBN (Print)CD-ROM 90-90100
DOIs
Publication statusPublished - 31 Oct 1996
Event18th Annual International Conference of the IEEE Engineering in Medicine and Biology Society, EMBC 1996: Bridging Disciplines for Biomedicine - Amsterdam, Netherlands
Duration: 31 Oct 19963 Nov 1996
Conference number: 18

Publication series

Name
PublisherIEEE
Volume1

Conference

Conference18th Annual International Conference of the IEEE Engineering in Medicine and Biology Society, EMBC 1996
Abbreviated titleEMBC
CountryNetherlands
CityAmsterdam
Period31/10/963/11/96

Keywords

  • METIS-114266
  • IR-17371

Cite this

Bielen, J. A., Bielen, J. A., Schmidt, A. W., Weiel, R., & Rutten, W. (1996). Fabrication of multi electrode array structures for intra-neural stimulation: assessment of the LIGA method. In Conference Proceedings 1996 IEEE Engineering in medicine and Biology 18th Annual International Conference (pp. -). Amsterdam: IEEE. https://doi.org/10.1109/IEMBS.1996.656947
Bielen, J.A. ; Bielen, J.A. ; Schmidt, A.W. ; Weiel, R. ; Rutten, Wim. / Fabrication of multi electrode array structures for intra-neural stimulation: assessment of the LIGA method. Conference Proceedings 1996 IEEE Engineering in medicine and Biology 18th Annual International Conference. Amsterdam : IEEE, 1996. pp. -
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Bielen, JA, Bielen, JA, Schmidt, AW, Weiel, R & Rutten, W 1996, Fabrication of multi electrode array structures for intra-neural stimulation: assessment of the LIGA method. in Conference Proceedings 1996 IEEE Engineering in medicine and Biology 18th Annual International Conference. IEEE, Amsterdam, pp. -, 18th Annual International Conference of the IEEE Engineering in Medicine and Biology Society, EMBC 1996, Amsterdam, Netherlands, 31/10/96. https://doi.org/10.1109/IEMBS.1996.656947

Fabrication of multi electrode array structures for intra-neural stimulation: assessment of the LIGA method. / Bielen, J.A.; Bielen, J.A.; Schmidt, A.W.; Weiel, R.; Rutten, Wim.

Conference Proceedings 1996 IEEE Engineering in medicine and Biology 18th Annual International Conference. Amsterdam : IEEE, 1996. p. -.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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T1 - Fabrication of multi electrode array structures for intra-neural stimulation: assessment of the LIGA method

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N2 - The fabrication of the basic structure of needle electrode arrays by means of the LIGA method is investigated. To be able to contact all needle electrodes individually, the arrays were fabricated on silicon wafers with a patterned interconnection layer. Though further improvement of the process is needed to increase yield of the very slim structures, this approach shows the feasibility of combining LIGA with silicon technology, thereby offering a useful tool for the fabrication of neural prostheses

AB - The fabrication of the basic structure of needle electrode arrays by means of the LIGA method is investigated. To be able to contact all needle electrodes individually, the arrays were fabricated on silicon wafers with a patterned interconnection layer. Though further improvement of the process is needed to increase yield of the very slim structures, this approach shows the feasibility of combining LIGA with silicon technology, thereby offering a useful tool for the fabrication of neural prostheses

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Bielen JA, Bielen JA, Schmidt AW, Weiel R, Rutten W. Fabrication of multi electrode array structures for intra-neural stimulation: assessment of the LIGA method. In Conference Proceedings 1996 IEEE Engineering in medicine and Biology 18th Annual International Conference. Amsterdam: IEEE. 1996. p. - https://doi.org/10.1109/IEMBS.1996.656947