Fabrication of nanofluidic devices in glass with polysilicon electrodes

V. G. Kutchoukov, L. Pakula, G. O.F. Parikesit, Y. Garini, L. K. Nanver, A. Bossche

Research output: Contribution to journalArticleAcademicpeer-review

16 Citations (Scopus)

Abstract

In this paper we present a novel fluidic device created in glass with polysilicon electrodes. We show that it is possible to fabricate electrodes with a sheet resistance of about 400 Ω/□ in the a:Si layer, used as an intermediate layer for the anodic bonding of two sodium containing glass wafers in which nanochannels have been etched. The fabricated polysilicon electrodes could be partly coated with a metal to reduce the resistance of the electrodes. Further research to use the fabricated fluidic devices on detecting and manipulating single molecules in solution is ongoing and will be reported elsewhere.

Original languageEnglish
Pages (from-to)602-607
Number of pages6
JournalSensors and Actuators, A: Physical
Volume123-124
DOIs
Publication statusPublished - 23 Sep 2005
Externally publishedYes

Fingerprint

Nanofluidics
Polysilicon
Fluidic devices
Fabrication
Glass
Electrodes
fabrication
electrodes
glass
fluidics
Sheet resistance
Metals
Sodium
sodium
wafers
Molecules
metals
molecules

Keywords

  • Anodic bonding
  • Glass
  • Nanochannels
  • Nanofluidic device

Cite this

Kutchoukov, V. G., Pakula, L., Parikesit, G. O. F., Garini, Y., Nanver, L. K., & Bossche, A. (2005). Fabrication of nanofluidic devices in glass with polysilicon electrodes. Sensors and Actuators, A: Physical, 123-124, 602-607. https://doi.org/10.1016/j.sna.2005.02.030
Kutchoukov, V. G. ; Pakula, L. ; Parikesit, G. O.F. ; Garini, Y. ; Nanver, L. K. ; Bossche, A. / Fabrication of nanofluidic devices in glass with polysilicon electrodes. In: Sensors and Actuators, A: Physical. 2005 ; Vol. 123-124. pp. 602-607.
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Fabrication of nanofluidic devices in glass with polysilicon electrodes. / Kutchoukov, V. G.; Pakula, L.; Parikesit, G. O.F.; Garini, Y.; Nanver, L. K.; Bossche, A.

In: Sensors and Actuators, A: Physical, Vol. 123-124, 23.09.2005, p. 602-607.

Research output: Contribution to journalArticleAcademicpeer-review

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