Fabrication of nanofluidic devices in glass with polysilicon electrodes

V. G. Kutchoukov; L. Pakula; G. O.F. Parikesit; Y. Garini; L. K. Nanver; A. Bossche

doi:10.1016/j.sna.2005.02.030

Fabrication of nanofluidic devices in glass with polysilicon electrodes

V. G. Kutchoukov^*, L. Pakula, G. O.F. Parikesit, Y. Garini, L. K. Nanver, A. Bossche

^*Corresponding author for this work

Research output: Contribution to journal › Article › Academic › peer-review

18 Citations (Scopus)

Abstract

In this paper we present a novel fluidic device created in glass with polysilicon electrodes. We show that it is possible to fabricate electrodes with a sheet resistance of about 400 Ω/□ in the a:Si layer, used as an intermediate layer for the anodic bonding of two sodium containing glass wafers in which nanochannels have been etched. The fabricated polysilicon electrodes could be partly coated with a metal to reduce the resistance of the electrodes. Further research to use the fabricated fluidic devices on detecting and manipulating single molecules in solution is ongoing and will be reported elsewhere.

Original language	English
Pages (from-to)	602-607
Number of pages	6
Journal	Sensors and Actuators A: Physical
Volume	123-124
DOIs	https://doi.org/10.1016/j.sna.2005.02.030
Publication status	Published - 23 Sept 2005
Externally published	Yes

Keywords

Anodic bonding
Glass
Nanochannels
Nanofluidic device

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10.1016/j.sna.2005.02.030

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title = "Fabrication of nanofluidic devices in glass with polysilicon electrodes",

abstract = "In this paper we present a novel fluidic device created in glass with polysilicon electrodes. We show that it is possible to fabricate electrodes with a sheet resistance of about 400 Ω/□ in the a:Si layer, used as an intermediate layer for the anodic bonding of two sodium containing glass wafers in which nanochannels have been etched. The fabricated polysilicon electrodes could be partly coated with a metal to reduce the resistance of the electrodes. Further research to use the fabricated fluidic devices on detecting and manipulating single molecules in solution is ongoing and will be reported elsewhere.",

keywords = "Anodic bonding, Glass, Nanochannels, Nanofluidic device",

author = "Kutchoukov, {V. G.} and L. Pakula and Parikesit, {G. O.F.} and Y. Garini and Nanver, {L. K.} and A. Bossche",

year = "2005",

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doi = "10.1016/j.sna.2005.02.030",

language = "English",

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AU - Kutchoukov, V. G.

AU - Pakula, L.

AU - Parikesit, G. O.F.

AU - Garini, Y.

AU - Nanver, L. K.

AU - Bossche, A.

PY - 2005/9/23

Y1 - 2005/9/23

N2 - In this paper we present a novel fluidic device created in glass with polysilicon electrodes. We show that it is possible to fabricate electrodes with a sheet resistance of about 400 Ω/□ in the a:Si layer, used as an intermediate layer for the anodic bonding of two sodium containing glass wafers in which nanochannels have been etched. The fabricated polysilicon electrodes could be partly coated with a metal to reduce the resistance of the electrodes. Further research to use the fabricated fluidic devices on detecting and manipulating single molecules in solution is ongoing and will be reported elsewhere.

AB - In this paper we present a novel fluidic device created in glass with polysilicon electrodes. We show that it is possible to fabricate electrodes with a sheet resistance of about 400 Ω/□ in the a:Si layer, used as an intermediate layer for the anodic bonding of two sodium containing glass wafers in which nanochannels have been etched. The fabricated polysilicon electrodes could be partly coated with a metal to reduce the resistance of the electrodes. Further research to use the fabricated fluidic devices on detecting and manipulating single molecules in solution is ongoing and will be reported elsewhere.

KW - Anodic bonding

KW - Glass

KW - Nanochannels

KW - Nanofluidic device

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DO - 10.1016/j.sna.2005.02.030

M3 - Article

AN - SCOPUS:24944441198

SN - 0924-4247

VL - 123-124

SP - 602

EP - 607

JO - Sensors and Actuators A: Physical

JF - Sensors and Actuators A: Physical

ER -

Fabrication of nanofluidic devices in glass with polysilicon electrodes

Abstract

Keywords

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