Abstract
In this paper we present a novel fluidic device created in glass with polysilicon electrodes. We show that it is possible to fabricate electrodes with a sheet resistance of about 400 Ω/□ in the a:Si layer, used as an intermediate layer for the anodic bonding of two sodium containing glass wafers in which nanochannels have been etched. The fabricated polysilicon electrodes could be partly coated with a metal to reduce the resistance of the electrodes. Further research to use the fabricated fluidic devices on detecting and manipulating single molecules in solution is ongoing and will be reported elsewhere.
| Original language | English |
|---|---|
| Pages (from-to) | 602-607 |
| Number of pages | 6 |
| Journal | Sensors and Actuators, A: Physical |
| Volume | 123-124 |
| DOIs | |
| Publication status | Published - 23 Sep 2005 |
| Externally published | Yes |
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Keywords
- Anodic bonding
- Glass
- Nanochannels
- Nanofluidic device
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Fabrication of nanofluidic devices in glass with polysilicon electrodes. / Kutchoukov, V. G.; Pakula, L.; Parikesit, G. O.F.; Garini, Y.; Nanver, L. K.; Bossche, A.
In: Sensors and Actuators, A: Physical, Vol. 123-124, 23.09.2005, p. 602-607.Research output: Contribution to journal › Article › Academic › peer-review
TY - JOUR
T1 - Fabrication of nanofluidic devices in glass with polysilicon electrodes
AU - Kutchoukov, V. G.
AU - Pakula, L.
AU - Parikesit, G. O.F.
AU - Garini, Y.
AU - Nanver, L. K.
AU - Bossche, A.
PY - 2005/9/23
Y1 - 2005/9/23
N2 - In this paper we present a novel fluidic device created in glass with polysilicon electrodes. We show that it is possible to fabricate electrodes with a sheet resistance of about 400 Ω/□ in the a:Si layer, used as an intermediate layer for the anodic bonding of two sodium containing glass wafers in which nanochannels have been etched. The fabricated polysilicon electrodes could be partly coated with a metal to reduce the resistance of the electrodes. Further research to use the fabricated fluidic devices on detecting and manipulating single molecules in solution is ongoing and will be reported elsewhere.
AB - In this paper we present a novel fluidic device created in glass with polysilicon electrodes. We show that it is possible to fabricate electrodes with a sheet resistance of about 400 Ω/□ in the a:Si layer, used as an intermediate layer for the anodic bonding of two sodium containing glass wafers in which nanochannels have been etched. The fabricated polysilicon electrodes could be partly coated with a metal to reduce the resistance of the electrodes. Further research to use the fabricated fluidic devices on detecting and manipulating single molecules in solution is ongoing and will be reported elsewhere.
KW - Anodic bonding
KW - Glass
KW - Nanochannels
KW - Nanofluidic device
UR - http://www.scopus.com/inward/record.url?scp=24944441198&partnerID=8YFLogxK
U2 - 10.1016/j.sna.2005.02.030
DO - 10.1016/j.sna.2005.02.030
M3 - Article
VL - 123-124
SP - 602
EP - 607
JO - Sensors and actuators. A: Physical
JF - Sensors and actuators. A: Physical
SN - 0924-4247
ER -