Fabrication of nanomechanical optical devices with aligned wafer bonding

C. Gui; G.J. Veldhuis; T.M. Koster; Paul Lambeck; Johan W. Berenschot; Johannes G.E. Gardeniers; Michael Curt Elwenspoek

doi:10.1007/s005420050153

Fabrication of nanomechanical optical devices with aligned wafer bonding

C. Gui
, G.J. Veldhuis
, T.M. Koster
, Paul Lambeck
, Johan W. Berenschot
, Johannes G.E. Gardeniers
, Michael Curt Elwenspoek

Research output: Contribution to journal › Article › Academic › peer-review

5 Citations (Scopus)

7 Downloads (Pure)

Abstract

This paper reports on a new method for making some types of integrated optical nanomechanical devices. Intensity modulators as well as phase modulators were fabricated using several silicon micromachining techniques, including chemical mechanical polishing and aligned wafer bonding. This new method enables batch fabrication of the nanomechanical optical devices, and enhances their performance.

Original language	Undefined
Pages (from-to)	138-143
Number of pages	6
Journal	Microsystem technologies
Volume	5
Issue number	5
DOIs	https://doi.org/10.1007/s005420050153
Publication status	Published - Feb 1999

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

SDG 9 Industry, Innovation, and Infrastructure

Keywords

METIS-112075
IR-15200
EWI-13224

Access to Document

10.1007/s005420050153

http://eprints.eemcs.utwente.nl/secure2/13224/01/JMT_5_138.pdf

Cite this

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title = "Fabrication of nanomechanical optical devices with aligned wafer bonding",

abstract = "This paper reports on a new method for making some types of integrated optical nanomechanical devices. Intensity modulators as well as phase modulators were fabricated using several silicon micromachining techniques, including chemical mechanical polishing and aligned wafer bonding. This new method enables batch fabrication of the nanomechanical optical devices, and enhances their performance.",

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author = "C. Gui and G.J. Veldhuis and T.M. Koster and Paul Lambeck and Berenschot, \{Johan W.\} and Gardeniers, \{Johannes G.E.\} and Elwenspoek, \{Michael Curt\}",

year = "1999",

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doi = "10.1007/s005420050153",

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AU - Gui, C.

AU - Veldhuis, G.J.

AU - Koster, T.M.

AU - Lambeck, Paul

AU - Berenschot, Johan W.

AU - Gardeniers, Johannes G.E.

AU - Elwenspoek, Michael Curt

PY - 1999/2

Y1 - 1999/2

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AB - This paper reports on a new method for making some types of integrated optical nanomechanical devices. Intensity modulators as well as phase modulators were fabricated using several silicon micromachining techniques, including chemical mechanical polishing and aligned wafer bonding. This new method enables batch fabrication of the nanomechanical optical devices, and enhances their performance.

KW - METIS-112075

KW - IR-15200

KW - EWI-13224

U2 - 10.1007/s005420050153

DO - 10.1007/s005420050153

M3 - Article

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JO - Microsystem technologies

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