Fabrication of nanomechanical optical devices with aligned wafer bonding

C. Gui, G.J. Veldhuis, T.M. Koster, Paul Lambeck, Johan W. Berenschot, Johannes G.E. Gardeniers, Michael Curt Elwenspoek

Research output: Contribution to journalArticleAcademicpeer-review

5 Citations (Scopus)

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