Fabrication of nanomechanical optical devices with aligned wafer bonding
- C. Gui
- , G.J. Veldhuis
- , T.M. Koster
- , Paul Lambeck
- , Johan W. Berenschot
- , Johannes G.E. Gardeniers
- , Michael Curt Elwenspoek
Research output: Contribution to journal › Article › Academic › peer-review
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