Fabrication of Nanostructures with Long-Range Order Using Block Copolymer Lithography

J.Y. Cheng, C.A. Ross, E.L. Thomas, H.I. Smith, Gyula J. Vancso

Research output: Contribution to journalArticleAcademicpeer-review

395 Citations (Scopus)
Original languageUndefined
Pages (from-to)3657-3659
Number of pages3
JournalApplied physics letters
Volume81
Issue number19
Publication statusPublished - 2002

Keywords

  • METIS-210486

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