Fabrication of Photonic Components by nanoimprint technology within ePIXnet

U. Plachetka, A. Kristensen, S. Scheerlinck, Jurriaan Huskens, N. Koo, H. Kurz

Research output: Contribution to journalArticleAcademicpeer-review

9 Citations (Scopus)

Abstract

The joined research activities on nanoimprint lithography (JRA-NIL) within a European Network of Excellence (ePIXnet) are described. The achievements are presented in three different exemplary applications.
Original languageUndefined
Pages (from-to)886-889
Number of pages4
JournalMicroelectronic engineering
Volume85
Issue number5-6
DOIs
Publication statusPublished - 2008

Keywords

  • IR-79087
  • METIS-254119
  • EC Grant Agreement nr.: FP6/034883
  • EC Grant Agreement nr.: FP6/500120
  • Photonics
  • ePIXnet
  • Nanoparticles
  • Nanoimprint

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