Fabrication of Photonic Components by nanoimprint technology within ePIXnet

U. Plachetka; A. Kristensen; S. Scheerlinck; Jurriaan Huskens; N. Koo; H. Kurz

doi:10.1016/j.mee.2008.01.013

Fabrication of Photonic Components by nanoimprint technology within ePIXnet

U. Plachetka, A. Kristensen, S. Scheerlinck, Jurriaan Huskens, N. Koo, H. Kurz

Research output: Contribution to journal › Article › Academic › peer-review

9 Citations (Scopus)

5 Downloads (Pure)

Abstract

The joined research activities on nanoimprint lithography (JRA-NIL) within a European Network of Excellence (ePIXnet) are described. The achievements are presented in three different exemplary applications.

Original language	Undefined
Pages (from-to)	886-889
Number of pages	4
Journal	Microelectronic engineering
Volume	85
Issue number	5-6
DOIs	https://doi.org/10.1016/j.mee.2008.01.013
Publication status	Published - 2008

Keywords

IR-79087
METIS-254119
EC Grant Agreement nr.: FP6/034883
EC Grant Agreement nr.: FP6/500120
Photonics
ePIXnet
Nanoparticles
Nanoimprint

Access to Document

10.1016/j.mee.2008.01.013

Cite this

@article{7568ab5c8c804b48bb538397e6312329,

title = "Fabrication of Photonic Components by nanoimprint technology within ePIXnet",

abstract = "The joined research activities on nanoimprint lithography (JRA-NIL) within a European Network of Excellence (ePIXnet) are described. The achievements are presented in three different exemplary applications.",

keywords = "IR-79087, METIS-254119, EC Grant Agreement nr.: FP6/034883, EC Grant Agreement nr.: FP6/500120, Photonics, ePIXnet, Nanoparticles, Nanoimprint",

author = "U. Plachetka and A. Kristensen and S. Scheerlinck and Jurriaan Huskens and N. Koo and H. Kurz",

year = "2008",

doi = "10.1016/j.mee.2008.01.013",

language = "Undefined",

volume = "85",

pages = "886--889",

journal = "Microelectronic engineering",

issn = "0167-9317",

publisher = "Elsevier B.V.",

number = "5-6",

}

TY - JOUR

T1 - Fabrication of Photonic Components by nanoimprint technology within ePIXnet

AU - Plachetka, U.

AU - Kristensen, A.

AU - Scheerlinck, S.

AU - Huskens, Jurriaan

AU - Koo, N.

AU - Kurz, H.

PY - 2008

Y1 - 2008

N2 - The joined research activities on nanoimprint lithography (JRA-NIL) within a European Network of Excellence (ePIXnet) are described. The achievements are presented in three different exemplary applications.

AB - The joined research activities on nanoimprint lithography (JRA-NIL) within a European Network of Excellence (ePIXnet) are described. The achievements are presented in three different exemplary applications.

KW - IR-79087

KW - METIS-254119

KW - EC Grant Agreement nr.: FP6/034883

KW - EC Grant Agreement nr.: FP6/500120

KW - Photonics

KW - ePIXnet

KW - Nanoparticles

KW - Nanoimprint

U2 - 10.1016/j.mee.2008.01.013

DO - 10.1016/j.mee.2008.01.013

M3 - Article

SN - 0167-9317

VL - 85

SP - 886

EP - 889

JO - Microelectronic engineering

JF - Microelectronic engineering

IS - 5-6

ER -