Fabrication of photonic crystal slabs and defects using laser interference lithography and focused ion beam-assisted depositon

R.M. de Ridder; C.G. Bostan; Hendricus A.G.M. van Wolferen; Inge van Dorssen; L. Vogelaar; Franciscus B. Segerink; L. Kuipers; N.F. van Hulst

doi:10.1109/ICTON.2002.1007836

Fabrication of photonic crystal slabs and defects using laser interference lithography and focused ion beam-assisted depositon

R.M. de Ridder, C.G. Bostan, Hendricus A.G.M. van Wolferen, Inge van Dorssen, L. Vogelaar, Franciscus B. Segerink, L. Kuipers, N.F. van Hulst

Optical Sciences

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

5 Citations (Scopus)

264 Downloads (Pure)

Abstract

A method is described for fabricating photonic crystal slabs, using a combination of laser interference lithography for generating a regular periodic structure (the crystal lattice), and focused ion beam-assisted deposition for defining defects in this lattice, which may act as waveguides or resonators. As an example, results will be shown of a photonic crystal slab with a line defect in silicon nitride.

Original language	Undefined
Title of host publication	Proceedings ICTON 2002
Place of Publication	Warsaw, Poland
Pages	14-19
Number of pages	6
DOIs	https://doi.org/10.1109/ICTON.2002.1007836
Publication status	Published - 21 Apr 2002
Event	4th International Conference on Transparent Optical Networks, ICTON 2002 - Warsaw, Poland Duration: 21 Apr 2002 → 25 Apr 2002 Conference number: 4

Conference

Conference	4th International Conference on Transparent Optical Networks, ICTON 2002
Abbreviated title	ICTON
Country/Territory	Poland
City	Warsaw
Period	21/04/02 → 25/04/02

Keywords

METIS-208291
IR-44056

Access to Document

10.1109/ICTON.2002.1007836

Fabrication_photonic_-_ridder

Cite this

@inproceedings{c6a585194a42465e93dd4bd9ab4ce812,

title = "Fabrication of photonic crystal slabs and defects using laser interference lithography and focused ion beam-assisted depositon",

abstract = "A method is described for fabricating photonic crystal slabs, using a combination of laser interference lithography for generating a regular periodic structure (the crystal lattice), and focused ion beam-assisted deposition for defining defects in this lattice, which may act as waveguides or resonators. As an example, results will be shown of a photonic crystal slab with a line defect in silicon nitride.",

keywords = "METIS-208291, IR-44056",

author = "{de Ridder}, R.M. and C.G. Bostan and {van Wolferen}, {Hendricus A.G.M.} and {van Dorssen}, Inge and L. Vogelaar and Segerink, {Franciscus B.} and L. Kuipers and {van Hulst}, N.F.",

note = "IEEE Cat.nr. 02EX551 ; 4th International Conference on Transparent Optical Networks, ICTON 2002 ; Conference date: 21-04-2002 Through 25-04-2002",

year = "2002",

month = apr,

day = "21",

doi = "10.1109/ICTON.2002.1007836",

language = "Undefined",

isbn = "0-7803-7375-8",

pages = "14--19",

booktitle = "Proceedings ICTON 2002",

}

de Ridder, RM, Bostan, CG, van Wolferen, HAGM, van Dorssen, I, Vogelaar, L, Segerink, FB, Kuipers, L & van Hulst, NF 2002, Fabrication of photonic crystal slabs and defects using laser interference lithography and focused ion beam-assisted depositon. in Proceedings ICTON 2002. Warsaw, Poland, pp. 14-19, 4th International Conference on Transparent Optical Networks, ICTON 2002, Warsaw, Poland, 21/04/02. https://doi.org/10.1109/ICTON.2002.1007836

Fabrication of photonic crystal slabs and defects using laser interference lithography and focused ion beam-assisted depositon. / de Ridder, R.M.; Bostan, C.G.; van Wolferen, Hendricus A.G.M. et al.
Proceedings ICTON 2002. Warsaw, Poland, 2002. p. 14-19.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Fabrication of photonic crystal slabs and defects using laser interference lithography and focused ion beam-assisted depositon

AU - de Ridder, R.M.

AU - Bostan, C.G.

AU - van Wolferen, Hendricus A.G.M.

AU - van Dorssen, Inge

AU - Vogelaar, L.

AU - Segerink, Franciscus B.

AU - Kuipers, L.

AU - van Hulst, N.F.

N1 - Conference code: 4

PY - 2002/4/21

Y1 - 2002/4/21

N2 - A method is described for fabricating photonic crystal slabs, using a combination of laser interference lithography for generating a regular periodic structure (the crystal lattice), and focused ion beam-assisted deposition for defining defects in this lattice, which may act as waveguides or resonators. As an example, results will be shown of a photonic crystal slab with a line defect in silicon nitride.

AB - A method is described for fabricating photonic crystal slabs, using a combination of laser interference lithography for generating a regular periodic structure (the crystal lattice), and focused ion beam-assisted deposition for defining defects in this lattice, which may act as waveguides or resonators. As an example, results will be shown of a photonic crystal slab with a line defect in silicon nitride.

KW - METIS-208291

KW - IR-44056

U2 - 10.1109/ICTON.2002.1007836

DO - 10.1109/ICTON.2002.1007836

M3 - Conference contribution

SN - 0-7803-7375-8

SP - 14

EP - 19

BT - Proceedings ICTON 2002

CY - Warsaw, Poland

T2 - 4th International Conference on Transparent Optical Networks, ICTON 2002

Y2 - 21 April 2002 through 25 April 2002

ER -