Fabrication of photonic crystal slabs and defects using laser interference lithography and focused ion beam-assisted depositon

R.M. de Ridder, C.G. Bostan, Hendricus A.G.M. van Wolferen, Inge van Dorssen, L. Vogelaar, Franciscus B. Segerink, L. Kuipers, N.F. van Hulst

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A method is described for fabricating photonic crystal slabs, using a combination of laser interference lithography for generating a regular periodic structure (the crystal lattice), and focused ion beam-assisted deposition for defining defects in this lattice, which may act as waveguides or resonators. As an example, results will be shown of a photonic crystal slab with a line defect in silicon nitride.
Original languageUndefined
Title of host publicationProceedings ICTON 2002
Place of PublicationWarsaw, Poland
Number of pages6
Publication statusPublished - 21 Apr 2002
Event4th International Conference on Transparent Optical Networks, ICTON 2002 - Warsaw, Poland
Duration: 21 Apr 200225 Apr 2002
Conference number: 4


Conference4th International Conference on Transparent Optical Networks, ICTON 2002
Abbreviated titleICTON


  • METIS-208291
  • IR-44056

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