Fabrication of Polymeric Multimode Waveguides and Devices in SU-8 Photoresist Using Selective Polymerization

A. Borreman, A.M.S. Musa, A.A.M. Kok, Mart Diemeer, A. Driessen

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    237 Downloads (Pure)

    Abstract

    Large cross section multimode waveguides have been realized in SU-8 using selective polymerization. SU-8 is a negative photoresist, which has shown good optical properties and it is mechanically and chemically stable. The fabricated waveguides have very smooth sidewalls and exhibit low optical losses. The fabrication method is simple and potentially very cost effective. N x N and 1 x N multimode power splitters have been realized using this fabrication technology.
    Original languageEnglish
    Title of host publicationProceedings IEEE/LEOS Benelux
    EditorsTaco D. Visser, Daan Lenstra, Hugo F. Schouten
    Place of PublicationAmsterdam
    PublisherVrije Universiteit Amsterdam
    Pages83-86
    Number of pages4
    ISBN (Print)90-807519-1-x
    Publication statusPublished - 9 Dec 2002
    Event7th IEEE/LEOS Benelux Chapter Annual Symposium 2002 - Amsterdam, Netherlands
    Duration: 9 Dec 20029 Dec 2002
    Conference number: 7

    Publication series

    Name
    PublisherVrije Universiteit Amsterdam

    Conference

    Conference7th IEEE/LEOS Benelux Chapter Annual Symposium 2002
    CountryNetherlands
    CityAmsterdam
    Period9/12/029/12/02

    Keywords

    • IR-58192
    • METIS-208218

    Fingerprint Dive into the research topics of 'Fabrication of Polymeric Multimode Waveguides and Devices in SU-8 Photoresist Using Selective Polymerization'. Together they form a unique fingerprint.

  • Cite this

    Borreman, A., Musa, A. M. S., Kok, A. A. M., Diemeer, M., & Driessen, A. (2002). Fabrication of Polymeric Multimode Waveguides and Devices in SU-8 Photoresist Using Selective Polymerization. In T. D. Visser, D. Lenstra, & H. F. Schouten (Eds.), Proceedings IEEE/LEOS Benelux (pp. 83-86). Amsterdam: Vrije Universiteit Amsterdam.