Abstract
Large cross section multimode waveguides have been realized in SU-8 using selective polymerization. SU-8 is a negative photoresist, which has shown good optical properties and it is mechanically and chemically stable. The fabricated waveguides have very smooth sidewalls and exhibit low optical losses. The fabrication method is simple and potentially very cost effective. N x N and 1 x N multimode power splitters have been realized using this fabrication technology.
Original language | English |
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Title of host publication | Proceedings IEEE/LEOS Benelux |
Editors | Taco D. Visser, Daan Lenstra, Hugo F. Schouten |
Place of Publication | Amsterdam |
Publisher | Vrije Universiteit |
Pages | 83-86 |
Number of pages | 4 |
ISBN (Print) | 90-807519-1-x |
Publication status | Published - 9 Dec 2002 |
Event | 7th IEEE/LEOS Benelux Chapter Annual Symposium 2002 - Amsterdam, Netherlands Duration: 9 Dec 2002 → 9 Dec 2002 Conference number: 7 |
Conference
Conference | 7th IEEE/LEOS Benelux Chapter Annual Symposium 2002 |
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Country/Territory | Netherlands |
City | Amsterdam |
Period | 9/12/02 → 9/12/02 |