We report the fabrication of multimode polymeric waveguides using spin coating, photolithography, and reactive ion etching. Different layer structures have been used, e.g., a UV curable resin is used as a core layer and PMMA as a lower and upper cladding. The layer systems can be spun with good uniformity with thicknesses matching multimode fiber dimensions, and smooth waveguide side-walls have been obtained after etching. The measured performance of these waveguides demonstrates that low-loss waveguides can be fabricated cheaply. The waveguides are used in the realization of novel compact multimode power splitters and star couplers.
|Title of host publication||2000 IEEE/LEOS Symposium Benelux chapter|
|Editors||X.J.M. Leijtens, J.H. Besten|
|Place of Publication||Delft University of Technology, The Netherlands|
|Number of pages||4|
|Publication status||Published - 30 Oct 2000|
|Event||IEEE/LEOS Symposium Benelux Chapter 2000 - University of Delft, Delft, Netherlands|
Duration: 30 Oct 2000 → 30 Oct 2000
|Conference||IEEE/LEOS Symposium Benelux Chapter 2000|
|Period||30/10/00 → 30/10/00|
Musa, A. M. S., Lagali, N. S., Sulur, N., Sengo, G., & Driessen, A. (2000). Fabrication of Polymeric Multimode Waveguides for Application in the Local Area Network and Optical Interconnects. In X. J. M. Leijtens, & J. H. Besten (Eds.), 2000 IEEE/LEOS Symposium Benelux chapter (pp. 95-98). Delft University of Technology, The Netherlands.