Abstract
We report the fabrication of multimode polymeric waveguides using spin coating, photolithography, and reactive ion etching. Different layer structures have been used, e.g., a UV curable resin is used as a core layer and PMMA as a lower and upper cladding. The layer systems can be spun with good uniformity with thicknesses matching multimode fiber dimensions, and smooth waveguide side-walls have been obtained after etching. The measured performance of these waveguides demonstrates that low-loss waveguides can be fabricated cheaply. The waveguides are used in the realization of novel compact multimode power splitters and star couplers.
| Original language | English |
|---|---|
| Title of host publication | 2000 IEEE/LEOS Symposium Benelux chapter |
| Editors | X.J.M. Leijtens, J.H. Besten |
| Place of Publication | Delft University of Technology, The Netherlands |
| Pages | 95-98 |
| Number of pages | 4 |
| Publication status | Published - 30 Oct 2000 |
| Event | IEEE/LEOS Symposium Benelux Chapter 2000 - University of Delft, Delft, Netherlands Duration: 30 Oct 2000 → 30 Oct 2000 |
Conference
| Conference | IEEE/LEOS Symposium Benelux Chapter 2000 |
|---|---|
| Country | Netherlands |
| City | Delft |
| Period | 30/10/00 → 30/10/00 |
Keywords
- METIS-130244
- IR-58173
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Cite this
Musa, A. M. S., Lagali, N. S., Sulur, N., Sengo, G., & Driessen, A. (2000). Fabrication of Polymeric Multimode Waveguides for Application in the Local Area Network and Optical Interconnects. In X. J. M. Leijtens, & J. H. Besten (Eds.), 2000 IEEE/LEOS Symposium Benelux chapter (pp. 95-98). Delft University of Technology, The Netherlands.