Skip to main navigation Skip to search Skip to main content

Fabrication of surface micromachined ain piezoelectric microstructures and its potential apllication to rf resonators

    Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

    33   Link opens in a new tab Citations (Scopus)
    176 Downloads (Pure)

    Fingerprint

    Dive into the research topics of 'Fabrication of surface micromachined ain piezoelectric microstructures and its potential apllication to rf resonators'. Together they form a unique fingerprint.
    Sort by

    Engineering

    Material Science