Fabrication of surface micromachined ain piezoelectric microstructures and its potential apllication to rf resonators

S. Saravanan, E. Berenschot, G. Krijnen, M. Elwenspoek

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    25 Citations (Scopus)
    56 Downloads (Pure)

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    Physics & Astronomy