Fabrication of three-dimensional nanostructures by focused ion beam milling

R.W. Tjerkstra; Franciscus B. Segerink; J.J. Kelly; Willem L. Vos

doi:10.1116/1.2912079

Fabrication of three-dimensional nanostructures by focused ion beam milling

R.W. Tjerkstra, Franciscus B. Segerink, J.J. Kelly, Willem L. Vos

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Abstract

The fabrication of an extended three-dimensional nanostructure with dimensions much larger than the feature size using a focused ion beam is described. By milling two identical patterns of pores with a designed diameter of 460 nm in orthogonal directions, a photonic crystal with an inverse woodpile structure was made in a gallium phosphide single crystal. The patterns are aligned with an unprecedented accuracy of 30 nm with respect to each other. The influence of GaP redeposition on the depth, shape, and size of the pores is described. A literature study revealed that the redeposition of GaP during milling is more pronounced than that of Si found in previous studies. An explanation for this phenomenon is given.

Original language	English
Pages (from-to)	973-977
Number of pages	5
Journal	Journal of vacuum science and technology. B: Microelectronics and nanometer structures
Volume	26
Issue number	3
DOIs	https://doi.org/10.1116/1.2912079
Publication status	Published - 2008

Keywords

METIS-247833
IR-60496

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10.1116/1.2912079

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abstract = "The fabrication of an extended three-dimensional nanostructure with dimensions much larger than the feature size using a focused ion beam is described. By milling two identical patterns of pores with a designed diameter of 460 nm in orthogonal directions, a photonic crystal with an inverse woodpile structure was made in a gallium phosphide single crystal. The patterns are aligned with an unprecedented accuracy of 30 nm with respect to each other. The influence of GaP redeposition on the depth, shape, and size of the pores is described. A literature study revealed that the redeposition of GaP during milling is more pronounced than that of Si found in previous studies. An explanation for this phenomenon is given.",

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T1 - Fabrication of three-dimensional nanostructures by focused ion beam milling

AU - Tjerkstra, R.W.

AU - Segerink, Franciscus B.

AU - Kelly, J.J.

AU - Vos, Willem L.

PY - 2008

Y1 - 2008

N2 - The fabrication of an extended three-dimensional nanostructure with dimensions much larger than the feature size using a focused ion beam is described. By milling two identical patterns of pores with a designed diameter of 460 nm in orthogonal directions, a photonic crystal with an inverse woodpile structure was made in a gallium phosphide single crystal. The patterns are aligned with an unprecedented accuracy of 30 nm with respect to each other. The influence of GaP redeposition on the depth, shape, and size of the pores is described. A literature study revealed that the redeposition of GaP during milling is more pronounced than that of Si found in previous studies. An explanation for this phenomenon is given.

AB - The fabrication of an extended three-dimensional nanostructure with dimensions much larger than the feature size using a focused ion beam is described. By milling two identical patterns of pores with a designed diameter of 460 nm in orthogonal directions, a photonic crystal with an inverse woodpile structure was made in a gallium phosphide single crystal. The patterns are aligned with an unprecedented accuracy of 30 nm with respect to each other. The influence of GaP redeposition on the depth, shape, and size of the pores is described. A literature study revealed that the redeposition of GaP during milling is more pronounced than that of Si found in previous studies. An explanation for this phenomenon is given.

KW - METIS-247833

KW - IR-60496

U2 - 10.1116/1.2912079

DO - 10.1116/1.2912079

M3 - Article

SN - 1071-1023

VL - 26

SP - 973

EP - 977

JO - Journal of vacuum science and technology. B: Microelectronics and nanometer structures

JF - Journal of vacuum science and technology. B: Microelectronics and nanometer structures

IS - 3

ER -

Fabrication of three-dimensional nanostructures by focused ion beam milling

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