TY - JOUR
T1 - Fabrication of tunnel junctions on thick X-ray absorbing substrates of Nb and Ta
AU - Hamster, A.W.
AU - Ferrari, E.
AU - Adelerhof, D.J.
AU - Brons, G.C.S.
AU - Flokstra, J.
AU - Rogalla, H.
AU - Bruijn, M.P.
AU - Kiewiet, F.
AU - Schoofs, I.J.E.
AU - Luiten, O.J.
AU - de Korte, P.A.J.
PY - 1996
Y1 - 1996
N2 - X-ray detectors based on absorber-junction combinations can combine a large detector area with position resolution and good energy resolution. We plan to use a thick, single crystal Nb or Ta absorber with readout tunnel junctions integrated on top as our next generation X-ray detector. The thickness of the absorber should ensure detection of more than 90% of the impinging photons. Special points of attention in the fabrication of this new detector, like surface preparation, the formation of contacts, and handling of the bulk absorber during the fabrication process are discussed.
AB - X-ray detectors based on absorber-junction combinations can combine a large detector area with position resolution and good energy resolution. We plan to use a thick, single crystal Nb or Ta absorber with readout tunnel junctions integrated on top as our next generation X-ray detector. The thickness of the absorber should ensure detection of more than 90% of the impinging photons. Special points of attention in the fabrication of this new detector, like surface preparation, the formation of contacts, and handling of the bulk absorber during the fabrication process are discussed.
U2 - 10.1016/0168-9002(95)01113-7
DO - 10.1016/0168-9002(95)01113-7
M3 - Article
VL - 370
SP - 124
EP - 125
JO - Nuclear instruments & methods in physics research. Section A : Accelerators, spectrometers, detectors and associated equipment
JF - Nuclear instruments & methods in physics research. Section A : Accelerators, spectrometers, detectors and associated equipment
SN - 0168-9002
IS - 370
ER -