Fabrication process for a large volume silicon nitride micro-combustor

Yiyuan Zhao, Henk-Willem Veltkamp, Meint J. de Boer, Yaxiang Zeng, Jarno Groenesteijn, Remco J. Wiegerink, Joost Conrad Lötters

    Research output: Contribution to conferenceAbstractOther research output

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    Abstract

    Micro-channels with large internal volumes are desired in highly exothermal micro-reactors, such as an integrated Wobbe index meter with on-chip microscale natural gas combustion and localized temperature sensing, or a propellant micro-thruster. State of the art experimental studies on microscale combustor devices have rarely been reported due to flame extinction phenomena in the small micro channels. The underlying reason for micro-flame extinction is that the small channel dimensions result in large surface-to-volume ratios, which induces thermal quenching and radical quenching of flames. Therefore, good thermal isolation and a chemically inert chamber inner wall material are needed with well controlled heating of the chamber walls and local temperature sensing. The structure needs to be mechanically strong and survive large temperature gradients. In this abstract we report a fabrication method for large volume micro-channels and reaction chambers with chemically inert silicon-rich silicon nitride (SiRN) walls and embedded silicon heaters. Additional platinum heaters and temperature sensors are deposited on top of the structures.
    Original languageEnglish
    Pages450
    Publication statusPublished - 19 Sep 2017

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    combustion chambers
    silicon nitrides
    flames
    fabrication
    chambers
    heaters
    microbalances
    extinction
    quenching
    combustion temperature
    natural gas
    propellants
    silicon
    temperature sensors
    gas temperature
    isolation
    temperature gradients
    platinum
    chips
    reactors

    Cite this

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    title = "Fabrication process for a large volume silicon nitride micro-combustor",
    abstract = "Micro-channels with large internal volumes are desired in highly exothermal micro-reactors, such as an integrated Wobbe index meter with on-chip microscale natural gas combustion and localized temperature sensing, or a propellant micro-thruster. State of the art experimental studies on microscale combustor devices have rarely been reported due to flame extinction phenomena in the small micro channels. The underlying reason for micro-flame extinction is that the small channel dimensions result in large surface-to-volume ratios, which induces thermal quenching and radical quenching of flames. Therefore, good thermal isolation and a chemically inert chamber inner wall material are needed with well controlled heating of the chamber walls and local temperature sensing. The structure needs to be mechanically strong and survive large temperature gradients. In this abstract we report a fabrication method for large volume micro-channels and reaction chambers with chemically inert silicon-rich silicon nitride (SiRN) walls and embedded silicon heaters. Additional platinum heaters and temperature sensors are deposited on top of the structures.",
    author = "Yiyuan Zhao and Henk-Willem Veltkamp and {de Boer}, {Meint J.} and Yaxiang Zeng and Jarno Groenesteijn and Wiegerink, {Remco J.} and L{\"o}tters, {Joost Conrad}",
    year = "2017",
    month = "9",
    day = "19",
    language = "English",
    pages = "450",

    }

    Fabrication process for a large volume silicon nitride micro-combustor. / Zhao, Yiyuan ; Veltkamp, Henk-Willem ; de Boer, Meint J.; Zeng, Yaxiang ; Groenesteijn, Jarno; Wiegerink, Remco J.; Lötters, Joost Conrad.

    2017. 450.

    Research output: Contribution to conferenceAbstractOther research output

    TY - CONF

    T1 - Fabrication process for a large volume silicon nitride micro-combustor

    AU - Zhao, Yiyuan

    AU - Veltkamp, Henk-Willem

    AU - de Boer, Meint J.

    AU - Zeng, Yaxiang

    AU - Groenesteijn, Jarno

    AU - Wiegerink, Remco J.

    AU - Lötters, Joost Conrad

    PY - 2017/9/19

    Y1 - 2017/9/19

    N2 - Micro-channels with large internal volumes are desired in highly exothermal micro-reactors, such as an integrated Wobbe index meter with on-chip microscale natural gas combustion and localized temperature sensing, or a propellant micro-thruster. State of the art experimental studies on microscale combustor devices have rarely been reported due to flame extinction phenomena in the small micro channels. The underlying reason for micro-flame extinction is that the small channel dimensions result in large surface-to-volume ratios, which induces thermal quenching and radical quenching of flames. Therefore, good thermal isolation and a chemically inert chamber inner wall material are needed with well controlled heating of the chamber walls and local temperature sensing. The structure needs to be mechanically strong and survive large temperature gradients. In this abstract we report a fabrication method for large volume micro-channels and reaction chambers with chemically inert silicon-rich silicon nitride (SiRN) walls and embedded silicon heaters. Additional platinum heaters and temperature sensors are deposited on top of the structures.

    AB - Micro-channels with large internal volumes are desired in highly exothermal micro-reactors, such as an integrated Wobbe index meter with on-chip microscale natural gas combustion and localized temperature sensing, or a propellant micro-thruster. State of the art experimental studies on microscale combustor devices have rarely been reported due to flame extinction phenomena in the small micro channels. The underlying reason for micro-flame extinction is that the small channel dimensions result in large surface-to-volume ratios, which induces thermal quenching and radical quenching of flames. Therefore, good thermal isolation and a chemically inert chamber inner wall material are needed with well controlled heating of the chamber walls and local temperature sensing. The structure needs to be mechanically strong and survive large temperature gradients. In this abstract we report a fabrication method for large volume micro-channels and reaction chambers with chemically inert silicon-rich silicon nitride (SiRN) walls and embedded silicon heaters. Additional platinum heaters and temperature sensors are deposited on top of the structures.

    UR - http://www.mne2017.org

    M3 - Abstract

    SP - 450

    ER -