Fabrication process of electrostatically driven vacuum encapsulated polysilicon resonators

R. Legtenberg, H.A.C. Tilmans

    Research output: Contribution to conferencePosterOther research output

    Original languageEnglish
    Publication statusPublished - 26 Jun 1992
    EventMESA Dag 1992 - Universiteit Twente, Enschede, Netherlands
    Duration: 26 Jun 199226 Jun 1992

    Conference

    ConferenceMESA Dag 1992
    CountryNetherlands
    CityEnschede
    Period26/06/9226/06/92
    Other(MESA Day/Meeting)

    Cite this