Fabrication process of electrostatically driven vacuum encapsulated polysilicon resonators

R. Legtenberg, H.A.C. Tilmans

    Research output: Contribution to conference › Poster › Other research output

    Original languageEnglish
    Publication statusPublished - 26 Jun 1992
    EventMESA Dag 1992 - Universiteit Twente, Enschede, Netherlands
    Duration: 26 Jun 1992 → 26 Jun 1992

    Conference

    ConferenceMESA Dag 1992
    Country/TerritoryNetherlands
    CityEnschede
    Period26/06/92 → 26/06/92
    Other(MESA Day/Meeting)

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