Fabrication scheme for dense aquatic flow sensor arrays

N. Izadi; Meint J. de Boer; Johan W. Berenschot; Remco J. Wiegerink; Theodorus S.J. Lammerink; Henricus V. Jansen; Gijsbertus J.M. Krijnen

Fabrication scheme for dense aquatic flow sensor arrays

N. Izadi, Meint J. de Boer, Johan W. Berenschot, Remco J. Wiegerink, Theodorus S.J. Lammerink, Henricus V. Jansen, Gijsbertus J.M. Krijnen

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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Abstract

A fabrication scheme to realize dense arrays of flexible, closed membranes with a small gap separating them from the substrate is presented. These membranes are the first step towards aquatic hair based flow sensors biomimicking fish lateral line. Electrodes are integrated underneath the membrane to avoid contact with the liquid. Arrays of membranes with a diameter of 100 μm, gap height of 3 μm, and mutual distance of 200 μm have been successfully fabricated.

Original language	Undefined
Title of host publication	Proceedings of Eurosensors XXII
Place of Publication	Germany
Publisher	Verein Deutscher Ingenieure e.V. (VDI)
Pages	912-915
Number of pages	4
ISBN (Print)	978-3-00-025217-4
Publication status	Published - Sep 2008
Event	22nd International Conference on Solid-State Sensors, Actuators, Microsystems and Nanosystems 2008 - Dresden, Germany Duration: 7 Sep 2008 → 10 Sep 2008 Conference number: 22

Publication series

Name
Publisher	Verein Deutscher Ingenieure e.V. (VDI)
Number	Supplement

Conference

Conference	22nd International Conference on Solid-State Sensors, Actuators, Microsystems and Nanosystems 2008
Abbreviated title	Eurosensors 2008
Country/Territory	Germany
City	Dresden
Period	7/09/08 → 10/09/08

Keywords

EWI-13533
IR-65016
METIS-251208
TST-Life like

Access to Document

Cite this

@inproceedings{b8c8dca74f63453fb1ff04a1f06b8910,

title = "Fabrication scheme for dense aquatic flow sensor arrays",

abstract = "A fabrication scheme to realize dense arrays of flexible, closed membranes with a small gap separating them from the substrate is presented. These membranes are the first step towards aquatic hair based flow sensors biomimicking fish lateral line. Electrodes are integrated underneath the membrane to avoid contact with the liquid. Arrays of membranes with a diameter of 100 μm, gap height of 3 μm, and mutual distance of 200 μm have been successfully fabricated.",

keywords = "EWI-13533, IR-65016, METIS-251208, TST-Life like",

author = "N. Izadi and {de Boer}, {Meint J.} and Berenschot, {Johan W.} and Wiegerink, {Remco J.} and Lammerink, {Theodorus S.J.} and Jansen, {Henricus V.} and Krijnen, {Gijsbertus J.M.}",

year = "2008",

month = sep,

language = "Undefined",

isbn = "978-3-00-025217-4",

publisher = "Verein Deutscher Ingenieure e.V. (VDI)",

number = "Supplement",

pages = "912--915",

booktitle = "Proceedings of Eurosensors XXII",

note = "null ; Conference date: 07-09-2008 Through 10-09-2008",

}

Izadi, N, de Boer, MJ, Berenschot, JW , Wiegerink, RJ , Lammerink, TSJ, Jansen, HV & Krijnen, GJM 2008, Fabrication scheme for dense aquatic flow sensor arrays. in Proceedings of Eurosensors XXII. Verein Deutscher Ingenieure e.V. (VDI), Germany, pp. 912-915, 22nd International Conference on Solid-State Sensors, Actuators, Microsystems and Nanosystems 2008, Dresden, Germany, 7/09/08.

TY - GEN

T1 - Fabrication scheme for dense aquatic flow sensor arrays

AU - Izadi, N.

AU - de Boer, Meint J.

AU - Berenschot, Johan W.

AU - Wiegerink, Remco J.

AU - Lammerink, Theodorus S.J.

AU - Jansen, Henricus V.

AU - Krijnen, Gijsbertus J.M.

N1 - Conference code: 22

PY - 2008/9

Y1 - 2008/9

N2 - A fabrication scheme to realize dense arrays of flexible, closed membranes with a small gap separating them from the substrate is presented. These membranes are the first step towards aquatic hair based flow sensors biomimicking fish lateral line. Electrodes are integrated underneath the membrane to avoid contact with the liquid. Arrays of membranes with a diameter of 100 μm, gap height of 3 μm, and mutual distance of 200 μm have been successfully fabricated.

AB - A fabrication scheme to realize dense arrays of flexible, closed membranes with a small gap separating them from the substrate is presented. These membranes are the first step towards aquatic hair based flow sensors biomimicking fish lateral line. Electrodes are integrated underneath the membrane to avoid contact with the liquid. Arrays of membranes with a diameter of 100 μm, gap height of 3 μm, and mutual distance of 200 μm have been successfully fabricated.

KW - EWI-13533

KW - IR-65016

KW - METIS-251208

KW - TST-Life like

M3 - Conference contribution

SN - 978-3-00-025217-4

SP - 912

EP - 915

BT - Proceedings of Eurosensors XXII

PB - Verein Deutscher Ingenieure e.V. (VDI)

CY - Germany

Y2 - 7 September 2008 through 10 September 2008

ER -