Fabrication scheme for dense aquatic flow sensor arrays

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    Abstract

    A fabrication scheme to realize dense arrays of flexible, closed membranes with a small gap separating them from the substrate is presented. These membranes are the first step towards aquatic hair based flow sensors biomimicking fish lateral line. Electrodes are integrated underneath the membrane to avoid contact with the liquid. Arrays of membranes with a diameter of 100 μm, gap height of 3 μm, and mutual distance of 200 μm have been successfully fabricated.
    Original languageUndefined
    Title of host publicationProceedings of Eurosensors XXII
    Place of PublicationGermany
    PublisherVerein Deutscher Ingenieure e.V. (VDI)
    Pages912-915
    Number of pages4
    ISBN (Print)978-3-00-025217-4
    Publication statusPublished - Sep 2008
    Event22nd International Conference on Solid-State Sensors, Actuators, Microsystems and Nanosystems 2008 - Dresden, Germany
    Duration: 7 Sep 200810 Sep 2008
    Conference number: 22

    Publication series

    Name
    PublisherVerein Deutscher Ingenieure e.V. (VDI)
    NumberSupplement

    Conference

    Conference22nd International Conference on Solid-State Sensors, Actuators, Microsystems and Nanosystems 2008
    Abbreviated titleEurosensors 2008
    CountryGermany
    CityDresden
    Period7/09/0810/09/08

    Keywords

    • EWI-13533
    • IR-65016
    • METIS-251208
    • TST-Life like

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