A fabrication scheme to realize dense arrays of flexible, closed membranes with a small gap separating them from the substrate is presented. These membranes are the first step towards aquatic hair based flow sensors biomimicking fish lateral line. Electrodes are integrated underneath the membrane to avoid contact with the liquid. Arrays of membranes with a diameter of 100 μm, gap height of 3 μm, and mutual distance of 200 μm have been successfully fabricated.
|Publisher||Verein Deutscher Ingenieure e.V. (VDI)|
|Conference||22nd International Conference on Solid-State Sensors, Actuators, Microsystems and Nanosystems 2008|
|Abbreviated title||Eurosensors 2008|
|Period||7/09/08 → 10/09/08|
- TST-Life like