TY - JOUR
T1 - Fabrications aspects of microwave devices, including ramp-type high-Tc Josephson junctions and log-periodic antenna's
AU - Terpstra, D.
AU - Rijnders, A.J.H.M.
AU - Roesthuis, F.J.G.
AU - Blank, D.H.A.
AU - Gerritsma, G.J.
AU - Rogalla, H.
PY - 1993
Y1 - 1993
N2 - We describe the development of high-Tc Josephson junction devices for applications at millimeter wave frequencies. These devices consist of ramp type YBCO/PBCO/YBCO Josephson junctions that are equipped with a noble metal log-periodic antenna. Growth conditions of all layers, as well as etching, cleaning and annealing procedures are being optimized, to guarantee well-defined device properties. Lowering the deposition temperature of the thick PBCO layer strongly improved its isolating properties, which is of extreme importance for good reproducability of junction fabrication. Special attention is being focused on the optimization of the contact of noble metal to YBCO as well its adhesion to the substrate. Best results are obtained using sputtered gold contacts, after a soft Ar ion sputter clean treatment of the damaged YBCO surface, followed by an anneal procedure.
AB - We describe the development of high-Tc Josephson junction devices for applications at millimeter wave frequencies. These devices consist of ramp type YBCO/PBCO/YBCO Josephson junctions that are equipped with a noble metal log-periodic antenna. Growth conditions of all layers, as well as etching, cleaning and annealing procedures are being optimized, to guarantee well-defined device properties. Lowering the deposition temperature of the thick PBCO layer strongly improved its isolating properties, which is of extreme importance for good reproducability of junction fabrication. Special attention is being focused on the optimization of the contact of noble metal to YBCO as well its adhesion to the substrate. Best results are obtained using sputtered gold contacts, after a soft Ar ion sputter clean treatment of the damaged YBCO surface, followed by an anneal procedure.
U2 - 10.1016/0925-8388(93)90838-E
DO - 10.1016/0925-8388(93)90838-E
M3 - Article
SN - 0925-8388
VL - 195
SP - 719
EP - 722
JO - Journal of alloys and compounds
JF - Journal of alloys and compounds
T2 - E-MRS Fall Meeting 1992
Y2 - 3 November 1992 through 6 November 1992
ER -