Failure mechanisms of pressurized microchannels, model and experiments

M.T. Blom; Niels Roelof Tas; G. Pandraud; E. Chmela; Johannes G.E. Gardeniers; Michael Curt Elwenspoek; Albert van den Berg; R.P Tijssen

doi:10.1109/MEMSYS.2000.838516

Failure mechanisms of pressurized microchannels, model and experiments

M.T. Blom, Niels Roelof Tas, G. Pandraud, E. Chmela, Johannes G.E. Gardeniers, Michael Curt Elwenspoek, Albert van den Berg, R.P Tijssen

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

159 Downloads (Pure)

Abstract

Microchannels were created by fusion bonding of a Pyrex and a thermally oxidized silicon wafer. The maximum pressure which can be applied to these channels was investigated. In order to find the relation between this maximum pressure, channel geometry, materials elasticity and bond energy an energy model was developed. It was shown that the model is substantiated by the pressure data, from which it could be calculated that the effective bond energy increased from 0.018 J/m2 to 0.19 J/m2 for an annealing temperature ranging from 3 10°C to 47OoC.

Original language	Undefined
Title of host publication	Micro Electro Mechanical Systems, 2000. MEMS 2000. The Thirteenth Annual International Conference on
Place of Publication	Piscataway
Publisher	IEEE
Pages	199-204
Number of pages	6
ISBN (Print)	0-7803-5273-4
DOIs	https://doi.org/10.1109/MEMSYS.2000.838516
Publication status	Published - 23 Jan 2000
Event	13th Annual International Conference on Micro Electro Mechanical Systems, MEMS 2000 - Miyazaki, Japan Duration: 23 Jan 2000 → 27 Jan 2000 Conference number: 13

Conference

Conference	13th Annual International Conference on Micro Electro Mechanical Systems, MEMS 2000
Abbreviated title	MEMS
Country/Territory	Japan
City	Miyazaki
Period	23/01/00 → 27/01/00

Keywords

METIS-113060
EWI-12895
IR-16175

Access to Document

10.1109/MEMSYS.2000.838516

Cite this

Blom, M. T., Tas, N. R., Pandraud, G., Chmela, E., Gardeniers, J. G. E., Elwenspoek, M. C., van den Berg, A., & Tijssen, R. P. (2000). Failure mechanisms of pressurized microchannels, model and experiments. In Micro Electro Mechanical Systems, 2000. MEMS 2000. The Thirteenth Annual International Conference on (pp. 199-204). IEEE. https://doi.org/10.1109/MEMSYS.2000.838516

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abstract = "Microchannels were created by fusion bonding of a Pyrex and a thermally oxidized silicon wafer. The maximum pressure which can be applied to these channels was investigated. In order to find the relation between this maximum pressure, channel geometry, materials elasticity and bond energy an energy model was developed. It was shown that the model is substantiated by the pressure data, from which it could be calculated that the effective bond energy increased from 0.018 J/m2 to 0.19 J/m2 for an annealing temperature ranging from 3 10°C to 47OoC.",

keywords = "METIS-113060, EWI-12895, IR-16175",

author = "M.T. Blom and Tas, {Niels Roelof} and G. Pandraud and E. Chmela and Gardeniers, {Johannes G.E.} and Elwenspoek, {Michael Curt} and {van den Berg}, Albert and R.P Tijssen",

year = "2000",

month = jan,

day = "23",

doi = "10.1109/MEMSYS.2000.838516",

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booktitle = "Micro Electro Mechanical Systems, 2000. MEMS 2000. The Thirteenth Annual International Conference on",

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note = "13th Annual International Conference on Micro Electro Mechanical Systems, MEMS 2000 ; Conference date: 23-01-2000 Through 27-01-2000",

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Blom, MT, Tas, NR, Pandraud, G, Chmela, E, Gardeniers, JGE, Elwenspoek, MC, van den Berg, A & Tijssen, RP 2000, Failure mechanisms of pressurized microchannels, model and experiments. in Micro Electro Mechanical Systems, 2000. MEMS 2000. The Thirteenth Annual International Conference on. IEEE, Piscataway, pp. 199-204, 13th Annual International Conference on Micro Electro Mechanical Systems, MEMS 2000, Miyazaki, Japan, 23/01/00. https://doi.org/10.1109/MEMSYS.2000.838516

Failure mechanisms of pressurized microchannels, model and experiments. / Blom, M.T.; Tas, Niels Roelof; Pandraud, G. et al.
Micro Electro Mechanical Systems, 2000. MEMS 2000. The Thirteenth Annual International Conference on. Piscataway: IEEE, 2000. p. 199-204.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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T1 - Failure mechanisms of pressurized microchannels, model and experiments

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AU - Tas, Niels Roelof

AU - Pandraud, G.

AU - Chmela, E.

AU - Gardeniers, Johannes G.E.

AU - Elwenspoek, Michael Curt

AU - van den Berg, Albert

AU - Tijssen, R.P

N1 - Conference code: 13

PY - 2000/1/23

Y1 - 2000/1/23

N2 - Microchannels were created by fusion bonding of a Pyrex and a thermally oxidized silicon wafer. The maximum pressure which can be applied to these channels was investigated. In order to find the relation between this maximum pressure, channel geometry, materials elasticity and bond energy an energy model was developed. It was shown that the model is substantiated by the pressure data, from which it could be calculated that the effective bond energy increased from 0.018 J/m2 to 0.19 J/m2 for an annealing temperature ranging from 3 10°C to 47OoC.

AB - Microchannels were created by fusion bonding of a Pyrex and a thermally oxidized silicon wafer. The maximum pressure which can be applied to these channels was investigated. In order to find the relation between this maximum pressure, channel geometry, materials elasticity and bond energy an energy model was developed. It was shown that the model is substantiated by the pressure data, from which it could be calculated that the effective bond energy increased from 0.018 J/m2 to 0.19 J/m2 for an annealing temperature ranging from 3 10°C to 47OoC.

KW - METIS-113060

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BT - Micro Electro Mechanical Systems, 2000. MEMS 2000. The Thirteenth Annual International Conference on

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