Wetting and dewetting are important phenomena in both nature and applications. In this thesis we studied fast contact line motion as part of the FOM Industrial Partnership Program “Contact line control during wetting and dewetting” in collaboration with ASML and Oce´. In particular we concentrate on questions relevant for ASML, in the context of immersion lithography systems.
|Award date||14 Feb 2013|
|Place of Publication||Enschede|
|Publication status||Published - 14 Feb 2013|