Fast contact line motion: fundamentals and applications

K.G. Winkels

Research output: ThesisPhD Thesis - Research UT, graduation UT

184 Downloads (Pure)

Abstract

Wetting and dewetting are important phenomena in both nature and applications. In this thesis we studied fast contact line motion as part of the FOM Industrial Partnership Program “Contact line control during wetting and dewetting” in collaboration with ASML and Oce´. In particular we concentrate on questions relevant for ASML, in the context of immersion lithography systems.
Original languageEnglish
Awarding Institution
  • University of Twente
Supervisors/Advisors
  • Lohse, Detlef, Supervisor
  • Snoeijer, Jacco H., Advisor
Award date14 Feb 2013
Place of PublicationEnschede
Publisher
Print ISBNs978-90-365-3517-5
DOIs
Publication statusPublished - 14 Feb 2013

Keywords

  • IR-84200
  • METIS-294374

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