Fast contact line motion: fundamentals and applications

K.G. Winkels

doi:10.3990/1.9789036535175

Fast contact line motion: fundamentals and applications

K.G. Winkels

Research output: Thesis › PhD Thesis - Research UT, graduation UT

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Abstract

Wetting and dewetting are important phenomena in both nature and applications. In this thesis we studied fast contact line motion as part of the FOM Industrial Partnership Program “Contact line control during wetting and dewetting” in collaboration with ASML and Oce´. In particular we concentrate on questions relevant for ASML, in the context of immersion lithography systems.

Original language	English
Qualification	Doctor of Philosophy
Awarding Institution	University of Twente
Supervisors/Advisors	Lohse, Detlef, Supervisor Snoeijer, Jacco H., Advisor
Award date	14 Feb 2013
Place of Publication	Enschede
Publisher	University of Twente
Print ISBNs	978-90-365-3517-5
DOIs	https://doi.org/10.3990/1.9789036535175
Publication status	Published - 14 Feb 2013

Keywords

IR-84200
METIS-294374

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title = "Fast contact line motion: fundamentals and applications",

abstract = "Wetting and dewetting are important phenomena in both nature and applications. In this thesis we studied fast contact line motion as part of the FOM Industrial Partnership Program “Contact line control during wetting and dewetting” in collaboration with ASML and Oce´. In particular we concentrate on questions relevant for ASML, in the context of immersion lithography systems.",

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AB - Wetting and dewetting are important phenomena in both nature and applications. In this thesis we studied fast contact line motion as part of the FOM Industrial Partnership Program “Contact line control during wetting and dewetting” in collaboration with ASML and Oce´. In particular we concentrate on questions relevant for ASML, in the context of immersion lithography systems.

KW - IR-84200

KW - METIS-294374

U2 - 10.3990/1.9789036535175

DO - 10.3990/1.9789036535175

M3 - PhD Thesis - Research UT, graduation UT

SN - 978-90-365-3517-5

PB - University of Twente

CY - Enschede

ER -

Fast contact line motion: fundamentals and applications

Abstract

Keywords

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