Fast etching of sacrificial galvanic coupled metals for nanochannel fabrication: experiments and theory

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Abstract

We demonstrate a 10-fold enhancement of the etch rate of sacrificial metals for nanochannel fabrication by galvanic coupling. This results in an etch time for the here examined nanochannels of 10 hours instead of 9 days without galvanic coupling. An additional feature of our device is that we integrated bare electrodes inside the channel. Furthermore, we offer a theoretical explanation of the observed etch rate based on mass transport.
Original languageUndefined
Title of host publicationEleventh International Conference on Miniaturized Systems for Chemistry and Life Sciences - The proceedings of microTAS 2007 Conference
EditorsJ.L. Viovy, P Tabeling, S. Descroix, L. Malaquin
Place of PublicationSan Diego
PublisherChemical and Biological Micro Systems Society
Pages515-517
Number of pages3
ISBN (Print)978-0-9798064-0-7
Publication statusPublished - 7 Oct 2007
Event11th International Conference on Miniaturized Systems for Chemistry and Life Sciences, µTAS 2007 - Paris, France
Duration: 7 Oct 200711 Oct 2007
Conference number: 11

Publication series

NameMicro Total Analysis Systems
PublisherChemical and Biological Microsystems Society
Number7
Volume1

Conference

Conference11th International Conference on Miniaturized Systems for Chemistry and Life Sciences, µTAS 2007
Abbreviated titleMicroTAS
CountryFrance
CityParis
Period7/10/0711/10/07

Keywords

  • EWI-11489
  • METIS-245818
  • IR-62038

Cite this

Sparreboom, W., Eijkel, J. C. T., & van den Berg, A. (2007). Fast etching of sacrificial galvanic coupled metals for nanochannel fabrication: experiments and theory. In J. L. Viovy, P. Tabeling, S. Descroix, & L. Malaquin (Eds.), Eleventh International Conference on Miniaturized Systems for Chemistry and Life Sciences - The proceedings of microTAS 2007 Conference (pp. 515-517). (Micro Total Analysis Systems; Vol. 1, No. 7). San Diego: Chemical and Biological Micro Systems Society.
Sparreboom, Wouter ; Eijkel, Jan C.T. ; van den Berg, Albert. / Fast etching of sacrificial galvanic coupled metals for nanochannel fabrication: experiments and theory. Eleventh International Conference on Miniaturized Systems for Chemistry and Life Sciences - The proceedings of microTAS 2007 Conference. editor / J.L. Viovy ; P Tabeling ; S. Descroix ; L. Malaquin. San Diego : Chemical and Biological Micro Systems Society, 2007. pp. 515-517 (Micro Total Analysis Systems; 7).
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title = "Fast etching of sacrificial galvanic coupled metals for nanochannel fabrication: experiments and theory",
abstract = "We demonstrate a 10-fold enhancement of the etch rate of sacrificial metals for nanochannel fabrication by galvanic coupling. This results in an etch time for the here examined nanochannels of 10 hours instead of 9 days without galvanic coupling. An additional feature of our device is that we integrated bare electrodes inside the channel. Furthermore, we offer a theoretical explanation of the observed etch rate based on mass transport.",
keywords = "EWI-11489, METIS-245818, IR-62038",
author = "Wouter Sparreboom and Eijkel, {Jan C.T.} and {van den Berg}, Albert",
year = "2007",
month = "10",
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isbn = "978-0-9798064-0-7",
series = "Micro Total Analysis Systems",
publisher = "Chemical and Biological Micro Systems Society",
number = "7",
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Sparreboom, W, Eijkel, JCT & van den Berg, A 2007, Fast etching of sacrificial galvanic coupled metals for nanochannel fabrication: experiments and theory. in JL Viovy, P Tabeling, S Descroix & L Malaquin (eds), Eleventh International Conference on Miniaturized Systems for Chemistry and Life Sciences - The proceedings of microTAS 2007 Conference. Micro Total Analysis Systems, no. 7, vol. 1, Chemical and Biological Micro Systems Society, San Diego, pp. 515-517, 11th International Conference on Miniaturized Systems for Chemistry and Life Sciences, µTAS 2007, Paris, France, 7/10/07.

Fast etching of sacrificial galvanic coupled metals for nanochannel fabrication: experiments and theory. / Sparreboom, Wouter; Eijkel, Jan C.T.; van den Berg, Albert.

Eleventh International Conference on Miniaturized Systems for Chemistry and Life Sciences - The proceedings of microTAS 2007 Conference. ed. / J.L. Viovy; P Tabeling; S. Descroix; L. Malaquin. San Diego : Chemical and Biological Micro Systems Society, 2007. p. 515-517 (Micro Total Analysis Systems; Vol. 1, No. 7).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

TY - GEN

T1 - Fast etching of sacrificial galvanic coupled metals for nanochannel fabrication: experiments and theory

AU - Sparreboom, Wouter

AU - Eijkel, Jan C.T.

AU - van den Berg, Albert

PY - 2007/10/7

Y1 - 2007/10/7

N2 - We demonstrate a 10-fold enhancement of the etch rate of sacrificial metals for nanochannel fabrication by galvanic coupling. This results in an etch time for the here examined nanochannels of 10 hours instead of 9 days without galvanic coupling. An additional feature of our device is that we integrated bare electrodes inside the channel. Furthermore, we offer a theoretical explanation of the observed etch rate based on mass transport.

AB - We demonstrate a 10-fold enhancement of the etch rate of sacrificial metals for nanochannel fabrication by galvanic coupling. This results in an etch time for the here examined nanochannels of 10 hours instead of 9 days without galvanic coupling. An additional feature of our device is that we integrated bare electrodes inside the channel. Furthermore, we offer a theoretical explanation of the observed etch rate based on mass transport.

KW - EWI-11489

KW - METIS-245818

KW - IR-62038

M3 - Conference contribution

SN - 978-0-9798064-0-7

T3 - Micro Total Analysis Systems

SP - 515

EP - 517

BT - Eleventh International Conference on Miniaturized Systems for Chemistry and Life Sciences - The proceedings of microTAS 2007 Conference

A2 - Viovy, J.L.

A2 - Tabeling, P

A2 - Descroix, S.

A2 - Malaquin, L.

PB - Chemical and Biological Micro Systems Society

CY - San Diego

ER -

Sparreboom W, Eijkel JCT, van den Berg A. Fast etching of sacrificial galvanic coupled metals for nanochannel fabrication: experiments and theory. In Viovy JL, Tabeling P, Descroix S, Malaquin L, editors, Eleventh International Conference on Miniaturized Systems for Chemistry and Life Sciences - The proceedings of microTAS 2007 Conference. San Diego: Chemical and Biological Micro Systems Society. 2007. p. 515-517. (Micro Total Analysis Systems; 7).