Fast etching of sacrificial galvanic coupled metals for nanochannel fabrication: experiments and theory

Wouter Sparreboom; Jan C.T. Eijkel; Albert van den Berg

Fast etching of sacrificial galvanic coupled metals for nanochannel fabrication: experiments and theory

Wouter Sparreboom, Jan C.T. Eijkel, Albert van den Berg

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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Abstract

We demonstrate a 10-fold enhancement of the etch rate of sacrificial metals for nanochannel fabrication by galvanic coupling. This results in an etch time for the here examined nanochannels of 10 hours instead of 9 days without galvanic coupling. An additional feature of our device is that we integrated bare electrodes inside the channel. Furthermore, we offer a theoretical explanation of the observed etch rate based on mass transport.

Original language	Undefined
Title of host publication	Eleventh International Conference on Miniaturized Systems for Chemistry and Life Sciences - The proceedings of microTAS 2007 Conference
Editors	J.L. Viovy, P Tabeling, S. Descroix, L. Malaquin
Place of Publication	San Diego
Publisher	The Chemical and Biological Microsystems Society
Pages	515-517
Number of pages	3
ISBN (Print)	978-0-9798064-0-7
Publication status	Published - 7 Oct 2007
Event	11th International Conference on Miniaturized Systems for Chemistry and Life Sciences, µTAS 2007 - Paris, France Duration: 7 Oct 2007 → 11 Oct 2007 Conference number: 11

Publication series

Name	Micro Total Analysis Systems
Publisher	Chemical and Biological Microsystems Society
Number	7
Volume	1

Conference

Conference	11th International Conference on Miniaturized Systems for Chemistry and Life Sciences, µTAS 2007
Abbreviated title	MicroTAS
Country/Territory	France
City	Paris
Period	7/10/07 → 11/10/07

Keywords

EWI-11489
METIS-245818
IR-62038

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

Access to Document

http://eprints.eemcs.utwente.nl/secure2/11489/01/sparreboom_microTAS2007.pdf

Cite this

Sparreboom, W., Eijkel, J. C. T., & van den Berg, A. (2007). Fast etching of sacrificial galvanic coupled metals for nanochannel fabrication: experiments and theory. In J. L. Viovy, P. Tabeling, S. Descroix, & L. Malaquin (Eds.), Eleventh International Conference on Miniaturized Systems for Chemistry and Life Sciences - The proceedings of microTAS 2007 Conference (pp. 515-517). (Micro Total Analysis Systems; Vol. 1, No. 7). The Chemical and Biological Microsystems Society. http://eprints.eemcs.utwente.nl/secure2/11489/01/sparreboom_microTAS2007.pdf

Sparreboom, Wouter ; Eijkel, Jan C.T. ; van den Berg, Albert. / Fast etching of sacrificial galvanic coupled metals for nanochannel fabrication: experiments and theory. Eleventh International Conference on Miniaturized Systems for Chemistry and Life Sciences - The proceedings of microTAS 2007 Conference. editor / J.L. Viovy ; P Tabeling ; S. Descroix ; L. Malaquin. San Diego : The Chemical and Biological Microsystems Society, 2007. pp. 515-517 (Micro Total Analysis Systems; 7).

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abstract = "We demonstrate a 10-fold enhancement of the etch rate of sacrificial metals for nanochannel fabrication by galvanic coupling. This results in an etch time for the here examined nanochannels of 10 hours instead of 9 days without galvanic coupling. An additional feature of our device is that we integrated bare electrodes inside the channel. Furthermore, we offer a theoretical explanation of the observed etch rate based on mass transport.",

keywords = "EWI-11489, METIS-245818, IR-62038",

author = "Wouter Sparreboom and Eijkel, {Jan C.T.} and {van den Berg}, Albert",

year = "2007",

month = oct,

day = "7",

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isbn = "978-0-9798064-0-7",

series = "Micro Total Analysis Systems",

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editor = "J.L. Viovy and P Tabeling and S. Descroix and L. Malaquin",

booktitle = "Eleventh International Conference on Miniaturized Systems for Chemistry and Life Sciences - The proceedings of microTAS 2007 Conference",

note = "11th International Conference on Miniaturized Systems for Chemistry and Life Sciences, µTAS 2007 ; Conference date: 07-10-2007 Through 11-10-2007",

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Sparreboom, W , Eijkel, JCT & van den Berg, A 2007, Fast etching of sacrificial galvanic coupled metals for nanochannel fabrication: experiments and theory. in JL Viovy, P Tabeling, S Descroix & L Malaquin (eds), Eleventh International Conference on Miniaturized Systems for Chemistry and Life Sciences - The proceedings of microTAS 2007 Conference. Micro Total Analysis Systems, no. 7, vol. 1, The Chemical and Biological Microsystems Society, San Diego, pp. 515-517, 11th International Conference on Miniaturized Systems for Chemistry and Life Sciences, µTAS 2007, Paris, France, 7/10/07. <http://eprints.eemcs.utwente.nl/secure2/11489/01/sparreboom_microTAS2007.pdf>

Fast etching of sacrificial galvanic coupled metals for nanochannel fabrication: experiments and theory. / Sparreboom, Wouter ; Eijkel, Jan C.T.; van den Berg, Albert.
Eleventh International Conference on Miniaturized Systems for Chemistry and Life Sciences - The proceedings of microTAS 2007 Conference. ed. / J.L. Viovy; P Tabeling; S. Descroix; L. Malaquin. San Diego: The Chemical and Biological Microsystems Society, 2007. p. 515-517 (Micro Total Analysis Systems; Vol. 1, No. 7).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Fast etching of sacrificial galvanic coupled metals for nanochannel fabrication: experiments and theory

AU - Sparreboom, Wouter

AU - Eijkel, Jan C.T.

AU - van den Berg, Albert

N1 - Conference code: 11

PY - 2007/10/7

Y1 - 2007/10/7

N2 - We demonstrate a 10-fold enhancement of the etch rate of sacrificial metals for nanochannel fabrication by galvanic coupling. This results in an etch time for the here examined nanochannels of 10 hours instead of 9 days without galvanic coupling. An additional feature of our device is that we integrated bare electrodes inside the channel. Furthermore, we offer a theoretical explanation of the observed etch rate based on mass transport.

AB - We demonstrate a 10-fold enhancement of the etch rate of sacrificial metals for nanochannel fabrication by galvanic coupling. This results in an etch time for the here examined nanochannels of 10 hours instead of 9 days without galvanic coupling. An additional feature of our device is that we integrated bare electrodes inside the channel. Furthermore, we offer a theoretical explanation of the observed etch rate based on mass transport.

KW - EWI-11489

KW - METIS-245818

KW - IR-62038

M3 - Conference contribution

SN - 978-0-9798064-0-7

T3 - Micro Total Analysis Systems

SP - 515

EP - 517

BT - Eleventh International Conference on Miniaturized Systems for Chemistry and Life Sciences - The proceedings of microTAS 2007 Conference

A2 - Viovy, J.L.

A2 - Tabeling, P

A2 - Descroix, S.

A2 - Malaquin, L.

PB - The Chemical and Biological Microsystems Society

CY - San Diego

T2 - 11th International Conference on Miniaturized Systems for Chemistry and Life Sciences, µTAS 2007

Y2 - 7 October 2007 through 11 October 2007

ER -

Sparreboom W , Eijkel JCT , van den Berg A. Fast etching of sacrificial galvanic coupled metals for nanochannel fabrication: experiments and theory. In Viovy JL, Tabeling P, Descroix S, Malaquin L, editors, Eleventh International Conference on Miniaturized Systems for Chemistry and Life Sciences - The proceedings of microTAS 2007 Conference. San Diego: The Chemical and Biological Microsystems Society. 2007. p. 515-517. (Micro Total Analysis Systems; 7).