Fast etching of sacrificial galvanic coupled metals for nanochannel fabrication: experiments and theory

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Abstract

    We demonstrate a 10-fold enhancement of the etch rate of sacrificial metals for nanochannel fabrication by galvanic coupling. This results in an etch time for the here examined nanochannels of 10 hours instead of 9 days without galvanic coupling. An additional feature of our device is that we integrated bare electrodes inside the channel. Furthermore, we offer a theoretical explanation of the observed etch rate based on mass transport.
    Original languageUndefined
    Title of host publicationEleventh International Conference on Miniaturized Systems for Chemistry and Life Sciences - The proceedings of microTAS 2007 Conference
    EditorsJ.L. Viovy, P Tabeling, S. Descroix, L. Malaquin
    Place of PublicationSan Diego
    PublisherChemical and Biological Micro Systems Society
    Pages515-517
    Number of pages3
    ISBN (Print)978-0-9798064-0-7
    Publication statusPublished - 7 Oct 2007
    Event11th International Conference on Miniaturized Systems for Chemistry and Life Sciences, µTAS 2007 - Paris, France
    Duration: 7 Oct 200711 Oct 2007
    Conference number: 11

    Publication series

    NameMicro Total Analysis Systems
    PublisherChemical and Biological Microsystems Society
    Number7
    Volume1

    Conference

    Conference11th International Conference on Miniaturized Systems for Chemistry and Life Sciences, µTAS 2007
    Abbreviated titleMicroTAS
    CountryFrance
    CityParis
    Period7/10/0711/10/07

    Keywords

    • EWI-11489
    • METIS-245818
    • IR-62038

    Cite this

    Sparreboom, W., Eijkel, J. C. T., & van den Berg, A. (2007). Fast etching of sacrificial galvanic coupled metals for nanochannel fabrication: experiments and theory. In J. L. Viovy, P. Tabeling, S. Descroix, & L. Malaquin (Eds.), Eleventh International Conference on Miniaturized Systems for Chemistry and Life Sciences - The proceedings of microTAS 2007 Conference (pp. 515-517). (Micro Total Analysis Systems; Vol. 1, No. 7). San Diego: Chemical and Biological Micro Systems Society.
    Sparreboom, Wouter ; Eijkel, Jan C.T. ; van den Berg, Albert. / Fast etching of sacrificial galvanic coupled metals for nanochannel fabrication: experiments and theory. Eleventh International Conference on Miniaturized Systems for Chemistry and Life Sciences - The proceedings of microTAS 2007 Conference. editor / J.L. Viovy ; P Tabeling ; S. Descroix ; L. Malaquin. San Diego : Chemical and Biological Micro Systems Society, 2007. pp. 515-517 (Micro Total Analysis Systems; 7).
    @inproceedings{3ee5ad596bcc42ecaf4c41808be8b18a,
    title = "Fast etching of sacrificial galvanic coupled metals for nanochannel fabrication: experiments and theory",
    abstract = "We demonstrate a 10-fold enhancement of the etch rate of sacrificial metals for nanochannel fabrication by galvanic coupling. This results in an etch time for the here examined nanochannels of 10 hours instead of 9 days without galvanic coupling. An additional feature of our device is that we integrated bare electrodes inside the channel. Furthermore, we offer a theoretical explanation of the observed etch rate based on mass transport.",
    keywords = "EWI-11489, METIS-245818, IR-62038",
    author = "Wouter Sparreboom and Eijkel, {Jan C.T.} and {van den Berg}, Albert",
    year = "2007",
    month = "10",
    day = "7",
    language = "Undefined",
    isbn = "978-0-9798064-0-7",
    series = "Micro Total Analysis Systems",
    publisher = "Chemical and Biological Micro Systems Society",
    number = "7",
    pages = "515--517",
    editor = "J.L. Viovy and P Tabeling and S. Descroix and L. Malaquin",
    booktitle = "Eleventh International Conference on Miniaturized Systems for Chemistry and Life Sciences - The proceedings of microTAS 2007 Conference",

    }

    Sparreboom, W, Eijkel, JCT & van den Berg, A 2007, Fast etching of sacrificial galvanic coupled metals for nanochannel fabrication: experiments and theory. in JL Viovy, P Tabeling, S Descroix & L Malaquin (eds), Eleventh International Conference on Miniaturized Systems for Chemistry and Life Sciences - The proceedings of microTAS 2007 Conference. Micro Total Analysis Systems, no. 7, vol. 1, Chemical and Biological Micro Systems Society, San Diego, pp. 515-517, 11th International Conference on Miniaturized Systems for Chemistry and Life Sciences, µTAS 2007, Paris, France, 7/10/07.

    Fast etching of sacrificial galvanic coupled metals for nanochannel fabrication: experiments and theory. / Sparreboom, Wouter; Eijkel, Jan C.T.; van den Berg, Albert.

    Eleventh International Conference on Miniaturized Systems for Chemistry and Life Sciences - The proceedings of microTAS 2007 Conference. ed. / J.L. Viovy; P Tabeling; S. Descroix; L. Malaquin. San Diego : Chemical and Biological Micro Systems Society, 2007. p. 515-517 (Micro Total Analysis Systems; Vol. 1, No. 7).

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    TY - GEN

    T1 - Fast etching of sacrificial galvanic coupled metals for nanochannel fabrication: experiments and theory

    AU - Sparreboom, Wouter

    AU - Eijkel, Jan C.T.

    AU - van den Berg, Albert

    PY - 2007/10/7

    Y1 - 2007/10/7

    N2 - We demonstrate a 10-fold enhancement of the etch rate of sacrificial metals for nanochannel fabrication by galvanic coupling. This results in an etch time for the here examined nanochannels of 10 hours instead of 9 days without galvanic coupling. An additional feature of our device is that we integrated bare electrodes inside the channel. Furthermore, we offer a theoretical explanation of the observed etch rate based on mass transport.

    AB - We demonstrate a 10-fold enhancement of the etch rate of sacrificial metals for nanochannel fabrication by galvanic coupling. This results in an etch time for the here examined nanochannels of 10 hours instead of 9 days without galvanic coupling. An additional feature of our device is that we integrated bare electrodes inside the channel. Furthermore, we offer a theoretical explanation of the observed etch rate based on mass transport.

    KW - EWI-11489

    KW - METIS-245818

    KW - IR-62038

    M3 - Conference contribution

    SN - 978-0-9798064-0-7

    T3 - Micro Total Analysis Systems

    SP - 515

    EP - 517

    BT - Eleventh International Conference on Miniaturized Systems for Chemistry and Life Sciences - The proceedings of microTAS 2007 Conference

    A2 - Viovy, J.L.

    A2 - Tabeling, P

    A2 - Descroix, S.

    A2 - Malaquin, L.

    PB - Chemical and Biological Micro Systems Society

    CY - San Diego

    ER -

    Sparreboom W, Eijkel JCT, van den Berg A. Fast etching of sacrificial galvanic coupled metals for nanochannel fabrication: experiments and theory. In Viovy JL, Tabeling P, Descroix S, Malaquin L, editors, Eleventh International Conference on Miniaturized Systems for Chemistry and Life Sciences - The proceedings of microTAS 2007 Conference. San Diego: Chemical and Biological Micro Systems Society. 2007. p. 515-517. (Micro Total Analysis Systems; 7).