FEM assisted design and simulation of novel electrothermal actuators

S. Deladi; G. Krijnen; M. Elwenspoek

FEM assisted design and simulation of novel electrothermal actuators

S. Deladi, G. Krijnen, M. Elwenspoek

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

5 Citations (Scopus)

46 Downloads (Pure)

Abstract

In this work the authors present the design, simulation, and experimental results of novel electrothermal actuators, such as the trimorph actuator for out-of-plane motion, the coupled in-plane actuator for in-plane motion and an actuator providing combined in- and out-of-plane motion that have been developed for tribological studies. They can be easily embedded into complex MEMS devices due to the materials, which have been used for the fabrication. FEM simulations and experiments showed that the actuators are able to provide large forces to overcome adhesion and stiction.

Original language	English
Title of host publication	Nanotech 2003
Subtitle of host publication	2003 Nanotechnology Conference and Trade Show, February 23-27, 2003, San Francisco, California, USA
Editors	Matthew Laudon, Bart Romanowicz
Place of Publication	Cambridge, MA
Publisher	Computational Publications
Pages	400-403
Number of pages	4
Volume	1
ISBN (Print)	0972842209
Publication status	Published - 23 Feb 2003
Event	2003 NSTI Nanotechnology Conference and Trade Show, Nanotech 2003 - Grand Hyatt San Francisco, San Francisco, United States Duration: 23 Feb 2003 → 27 Feb 2003

Conference

Conference	2003 NSTI Nanotechnology Conference and Trade Show, Nanotech 2003
Abbreviated title	Nanotech
Country/Territory	United States
City	San Francisco
Period	23/02/03 → 27/02/03

Keywords

FEM simulation
Trimproph actuator
Out-of-plane
In-plane
Stiction
Adhesion

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Cite this

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title = "FEM assisted design and simulation of novel electrothermal actuators",

abstract = "In this work the authors present the design, simulation, and experimental results of novel electrothermal actuators, such as the trimorph actuator for out-of-plane motion, the coupled in-plane actuator for in-plane motion and an actuator providing combined in- and out-of-plane motion that have been developed for tribological studies. They can be easily embedded into complex MEMS devices due to the materials, which have been used for the fabrication. FEM simulations and experiments showed that the actuators are able to provide large forces to overcome adhesion and stiction.",

keywords = "FEM simulation, Trimproph actuator, Out-of-plane, In-plane, Stiction, Adhesion",

author = "S. Deladi and G. Krijnen and M. Elwenspoek",

year = "2003",

month = feb,

day = "23",

language = "English",

isbn = "0972842209",

volume = "1",

pages = "400--403",

editor = "Matthew Laudon and Bart Romanowicz",

booktitle = "Nanotech 2003",

publisher = "Computational Publications",

note = "2003 NSTI Nanotechnology Conference and Trade Show, Nanotech 2003, Nanotech ; Conference date: 23-02-2003 Through 27-02-2003",

}

Deladi, S, Krijnen, G & Elwenspoek, M 2003, FEM assisted design and simulation of novel electrothermal actuators. in M Laudon & B Romanowicz (eds), Nanotech 2003: 2003 Nanotechnology Conference and Trade Show, February 23-27, 2003, San Francisco, California, USA. vol. 1, Computational Publications, Cambridge, MA, pp. 400-403, 2003 NSTI Nanotechnology Conference and Trade Show, Nanotech 2003, San Francisco, California, United States, 23/02/03.

FEM assisted design and simulation of novel electrothermal actuators. / Deladi, S.; Krijnen, G.; Elwenspoek, M.
Nanotech 2003: 2003 Nanotechnology Conference and Trade Show, February 23-27, 2003, San Francisco, California, USA. ed. / Matthew Laudon; Bart Romanowicz. Vol. 1 Cambridge, MA: Computational Publications, 2003. p. 400-403.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - FEM assisted design and simulation of novel electrothermal actuators

AU - Deladi, S.

AU - Krijnen, G.

AU - Elwenspoek, M.

PY - 2003/2/23

Y1 - 2003/2/23

N2 - In this work the authors present the design, simulation, and experimental results of novel electrothermal actuators, such as the trimorph actuator for out-of-plane motion, the coupled in-plane actuator for in-plane motion and an actuator providing combined in- and out-of-plane motion that have been developed for tribological studies. They can be easily embedded into complex MEMS devices due to the materials, which have been used for the fabrication. FEM simulations and experiments showed that the actuators are able to provide large forces to overcome adhesion and stiction.

AB - In this work the authors present the design, simulation, and experimental results of novel electrothermal actuators, such as the trimorph actuator for out-of-plane motion, the coupled in-plane actuator for in-plane motion and an actuator providing combined in- and out-of-plane motion that have been developed for tribological studies. They can be easily embedded into complex MEMS devices due to the materials, which have been used for the fabrication. FEM simulations and experiments showed that the actuators are able to provide large forces to overcome adhesion and stiction.

KW - FEM simulation

KW - Trimproph actuator

KW - Out-of-plane

KW - In-plane

KW - Stiction

KW - Adhesion

M3 - Conference contribution

SN - 0972842209

VL - 1

SP - 400

EP - 403

BT - Nanotech 2003

A2 - Laudon, Matthew

A2 - Romanowicz, Bart

PB - Computational Publications

CY - Cambridge, MA

T2 - 2003 NSTI Nanotechnology Conference and Trade Show, Nanotech 2003

Y2 - 23 February 2003 through 27 February 2003

ER -

FEM assisted design and simulation of novel electrothermal actuators

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Keywords

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