FEM assisted design and simulation of novel electrothermal actuators

S. Deladi, G. Krijnen, M. Elwenspoek

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    4 Citations (Scopus)
    19 Downloads (Pure)

    Abstract

    In this work the authors present the design, simulation, and experimental results of novel electrothermal actuators, such as the trimorph actuator for out-of-plane motion, the coupled in-plane actuator for in-plane motion and an actuator providing combined in- and out-of-plane motion that have been developed for tribological studies. They can be easily embedded into complex MEMS devices due to the materials, which have been used for the fabrication. FEM simulations and experiments showed that the actuators are able to provide large forces to overcome adhesion and stiction.
    Original languageEnglish
    Title of host publicationNanotech 2003
    Subtitle of host publication 2003 Nanotechnology Conference and Trade Show, February 23-27, 2003, San Francisco, California, USA
    EditorsMatthew Laudon, Bart Romanowicz
    Place of PublicationCambridge, MA
    PublisherComputational Publications
    Pages400-403
    Number of pages4
    Volume1
    ISBN (Print)0972842209
    Publication statusPublished - 23 Feb 2003
    Event2003 NSTI Nanotechnology Conference and Trade Show, Nanotech 2003 - Grand Hyatt San Francisco, San Francisco, United States
    Duration: 23 Feb 200327 Feb 2003

    Conference

    Conference2003 NSTI Nanotechnology Conference and Trade Show, Nanotech 2003
    Abbreviated titleNanotech
    CountryUnited States
    CitySan Francisco
    Period23/02/0327/02/03

    Keywords

    • FEM simulation
    • Trimproph actuator
    • Out-of-plane
    • In-plane
    • Stiction
    • Adhesion

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