Fiber-based ellipsometry for in situ monitoring

Research output: Other contributionOther research output

Abstract

A limitation of in situ ellipsometry is line-of-sight access. We show that accurate and precise values for Y and D can be obtained while using a polarization preserving fiber to deliver light to the sample.
Original languageEnglish
Place of PublicationBaltimore, US
Publication statusPublished - 2011

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preserving
line of sight
ellipsometry
fibers
polarization

Keywords

  • METIS-304949

Cite this

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title = "Fiber-based ellipsometry for in situ monitoring",
abstract = "A limitation of in situ ellipsometry is line-of-sight access. We show that accurate and precise values for Y and D can be obtained while using a polarization preserving fiber to deliver light to the sample.",
keywords = "METIS-304949",
author = "Fei Liu and Lee, {Christopher James} and Juequan Chen and Eric Louis and Frederik Bijkerk",
year = "2011",
language = "English",
type = "Other",

}

Fiber-based ellipsometry for in situ monitoring. / Liu, Fei; Lee, Christopher James; Chen, Juequan; Louis, Eric; Bijkerk, Frederik.

Baltimore, US. 2011, .

Research output: Other contributionOther research output

TY - GEN

T1 - Fiber-based ellipsometry for in situ monitoring

AU - Liu, Fei

AU - Lee, Christopher James

AU - Chen, Juequan

AU - Louis, Eric

AU - Bijkerk, Frederik

PY - 2011

Y1 - 2011

N2 - A limitation of in situ ellipsometry is line-of-sight access. We show that accurate and precise values for Y and D can be obtained while using a polarization preserving fiber to deliver light to the sample.

AB - A limitation of in situ ellipsometry is line-of-sight access. We show that accurate and precise values for Y and D can be obtained while using a polarization preserving fiber to deliver light to the sample.

KW - METIS-304949

M3 - Other contribution

CY - Baltimore, US

ER -