Fiber-based ellipsometry for in situ monitoring

Fei Liu, Christopher James Lee, Juequan Chen, Eric Louis, Frederik Bijkerk

Research output: Other contributionOther research output


A limitation of in situ ellipsometry is line-of-sight access. We show that accurate and precise values for Y and D can be obtained while using a polarization preserving fiber to deliver light to the sample.
Original languageEnglish
Place of PublicationBaltimore, US
Publication statusPublished - 2011


  • METIS-304949


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