Fiber-based ellipsometry for in situ monitoring

Fei Liu; Christopher James Lee; Juequan Chen; Eric Louis; Frederik Bijkerk

Fiber-based ellipsometry for in situ monitoring

Fei Liu, Christopher James Lee, Juequan Chen, Eric Louis, Frederik Bijkerk

Research output: Other contribution › Other research output

Abstract

A limitation of in situ ellipsometry is line-of-sight access. We show that accurate and precise values for Y and D can be obtained while using a polarization preserving fiber to deliver light to the sample.

Original language	English
Place of Publication	Baltimore, US
Publication status	Published - 2011

Keywords

METIS-304949

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@misc{12e02db66a234003bfda10b5747daeb4,

title = "Fiber-based ellipsometry for in situ monitoring",

abstract = "A limitation of in situ ellipsometry is line-of-sight access. We show that accurate and precise values for Y and D can be obtained while using a polarization preserving fiber to deliver light to the sample.",

keywords = "METIS-304949",

author = "Fei Liu and Lee, \{Christopher James\} and Juequan Chen and Eric Louis and Frederik Bijkerk",

year = "2011",

language = "English",

type = "Other",

}

TY - GEN

T1 - Fiber-based ellipsometry for in situ monitoring

AU - Liu, Fei

AU - Lee, Christopher James

AU - Chen, Juequan

AU - Louis, Eric

AU - Bijkerk, Frederik

PY - 2011

Y1 - 2011

N2 - A limitation of in situ ellipsometry is line-of-sight access. We show that accurate and precise values for Y and D can be obtained while using a polarization preserving fiber to deliver light to the sample.

AB - A limitation of in situ ellipsometry is line-of-sight access. We show that accurate and precise values for Y and D can be obtained while using a polarization preserving fiber to deliver light to the sample.

KW - METIS-304949

M3 - Other contribution

CY - Baltimore, US

ER -

Fiber-based ellipsometry for in situ monitoring

Abstract

Keywords

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