Fiber-top cantilever: a new generation of micromachined sensors for multipurpose applications

D. Iannuzzi, S. Deladi, H. Schreuders, M. Slaman, J.H. Rector, Michael Curt Elwenspoek

    Research output: Contribution to journalArticleAcademicpeer-review

    3 Citations (Scopus)
    26 Downloads (Pure)

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