Fiber-top cantilever: a new generation of micromachined sensors for multipurpose applications

D. Iannuzzi, S. Deladi, H. Schreuders, M. Slaman, J.H. Rector, M.C. Elwenspoek

    Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

    4 Citations (Scopus)
    29 Downloads (Pure)

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    Physics & Astronomy