Fibre-top cantilevers: design, fabrication and applications

D. Iannuzzi, K. Heeck, M. Slaman, S. De Man, J.H. Rector, H. Schreuders, Johan W. Berenschot, V.J. Gadgil, Remco G.P. Sanders, Michael Curt Elwenspoek, S. Deladi

    Research output: Contribution to journalArticleAcademicpeer-review

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    Abstract

    Fibre-top cantilevers are a new generation of miniaturized devices obtained by carving tiny mechanical beams directly on the cleaved edge of an optical fibre. The light coupled from the other side of the fibre allows measurements of the position of the cantilever with sub-nanometre accuracy. The monolithic structure of the device, the absence of electronic contacts on the sensing head, and the simplicity of the working principle offer unprecedented opportunities for the development of scientific instruments for both standard applications and utilization beyond research laboratories. In this paper we review the results that our group has obtained over the last year in the development of this technology. We describe the working principle and the fabrication procedure, and we present a series of proof-of-concept experiments that demonstrate that fibre-top cantilevers can be used both for atomic force microscopy and for the detection of chemical species.
    Original languageUndefined
    Article number10.1088/0957-0233/18/10/S30
    Pages (from-to)3247-3252
    Number of pages6
    JournalMeasurement science and technology
    Volume18
    Issue number07CH37910C/10
    DOIs
    Publication statusPublished - 12 Sep 2007

    Keywords

    • optical fibres
    • fibre-top devices
    • EWI-11659
    • Atomic Force Microscopy
    • IR-64564
    • Cantilevers
    • Chemical sensors
    • METIS-245904

    Cite this

    Iannuzzi, D., Heeck, K., Slaman, M., De Man, S., Rector, J. H., Schreuders, H., ... Deladi, S. (2007). Fibre-top cantilevers: design, fabrication and applications. Measurement science and technology, 18(07CH37910C/10), 3247-3252. [10.1088/0957-0233/18/10/S30]. https://doi.org/10.1088/0957-0233/18/10/S30