Field-effect flow control for microfabricated fluidic networks

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The magnitude and direction of the electro-osmotic flow (EOF) inside a microfabricated fluid channel can be controlled by a perpendicular electric field of 1.5 megavolts per centimeter generated by a voltage of only 50 volts. A microdevice called a "flowFET," with functionality comparable to that of a field-effect transistor (FET) in microelectronics, has been realized. Two flowFETs integrated with a channel junction have been used to generate opposite flows inside a single EOF-pumped channel, thus illustrating the potential of the flowFET as a controlling and switching element in microfluidic networks.
Original languageEnglish
Pages (from-to)942-945
Issue number5441
Publication statusPublished - 1999


  • METIS-111672
  • IR-14560


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