Field Emission for resonance sensing in MEMS/NEMS

C.K. Yang, A.J. le Fèbre, G. Pandraud, D. van der Drift, P.J. French

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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    Abstract

    In the past decades, there is a considerable interest in the sensor community to move from micron to nano-devices, typically scaling of resonators such as cantilever beams.
    Original languageUndefined
    Title of host publication20th International Vacuum Nanoelectronics Conference
    Place of PublicationLos Alamitos
    PublisherIEEE Computer Society
    Pages72-73
    Number of pages2
    ISBN (Print)1-4244-1134-3
    DOIs
    Publication statusPublished - Jul 2007
    Event2007 IEEE 20th International Vacuum Nanoelectronics Conference, IVNC 2007 - Holiday Inn Chicago Mart Plaza Hotel, Chicago, United States
    Duration: 8 Jul 200712 Jul 2007
    Conference number: 20

    Publication series

    Name
    PublisherIEEE Computer Society Press

    Conference

    Conference2007 IEEE 20th International Vacuum Nanoelectronics Conference, IVNC 2007
    Abbreviated titleIVNC
    CountryUnited States
    CityChicago
    Period8/07/0712/07/07

    Keywords

    • EWI-9805
    • TST-uSPAM: micro Scanning Probe Array Memory
    • IR-67099
    • METIS-245711
    • TST-SMI: Formerly in EWI-SMI

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