Abstract
In the past decades, there is a considerable interest in the sensor community to move from
micron to nano-devices, typically scaling of resonators such as cantilever beams.
Original language | Undefined |
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Title of host publication | 20th International Vacuum Nanoelectronics Conference |
Place of Publication | Los Alamitos |
Publisher | IEEE Computer Society |
Pages | 72-73 |
Number of pages | 2 |
ISBN (Print) | 1-4244-1134-3 |
DOIs | |
Publication status | Published - Jul 2007 |
Event | 2007 IEEE 20th International Vacuum Nanoelectronics Conference, IVNC 2007 - Holiday Inn Chicago Mart Plaza Hotel, Chicago, United States Duration: 8 Jul 2007 → 12 Jul 2007 Conference number: 20 |
Publication series
Name | |
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Publisher | IEEE Computer Society Press |
Conference
Conference | 2007 IEEE 20th International Vacuum Nanoelectronics Conference, IVNC 2007 |
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Abbreviated title | IVNC |
Country | United States |
City | Chicago |
Period | 8/07/07 → 12/07/07 |
Keywords
- EWI-9805
- TST-uSPAM: micro Scanning Probe Array Memory
- IR-67099
- METIS-245711
- TST-SMI: Formerly in EWI-SMI