Field Emission for resonance sensing in MEMS/NEMS

C.K. Yang; A.J. le Fèbre; G. Pandraud; D. van der Drift; P.J. French

doi:10.1109/IVNC.2007.4480937

Field Emission for resonance sensing in MEMS/NEMS

C.K. Yang, A.J. le Fèbre, G. Pandraud, D. van der Drift, P.J. French

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

96 Downloads (Pure)

Abstract

In the past decades, there is a considerable interest in the sensor community to move from micron to nano-devices, typically scaling of resonators such as cantilever beams.

Original language	Undefined
Title of host publication	20th International Vacuum Nanoelectronics Conference
Place of Publication	Los Alamitos
Publisher	IEEE Computer Society
Pages	72-73
Number of pages	2
ISBN (Print)	1-4244-1134-3
DOIs	https://doi.org/10.1109/IVNC.2007.4480937
Publication status	Published - Jul 2007
Event	2007 IEEE 20th International Vacuum Nanoelectronics Conference, IVNC 2007 - Holiday Inn Chicago Mart Plaza Hotel, Chicago, United States Duration: 8 Jul 2007 → 12 Jul 2007 Conference number: 20

Publication series

Name
Publisher	IEEE Computer Society Press

Conference

Conference	2007 IEEE 20th International Vacuum Nanoelectronics Conference, IVNC 2007
Abbreviated title	IVNC
Country	United States
City	Chicago
Period	8/07/07 → 12/07/07

Keywords

EWI-9805
TST-uSPAM: micro Scanning Probe Array Memory
IR-67099
METIS-245711
TST-SMI: Formerly in EWI-SMI

Access to Document

10.1109/IVNC.2007.4480937

Yang-2007_IVNC_Proceedings
open
Yang-2007_IVNC_Proceedings
open

Cite this

@inproceedings{aaf5841b5c6449e399476c38946656c0,

title = "Field Emission for resonance sensing in MEMS/NEMS",

abstract = "In the past decades, there is a considerable interest in the sensor community to move from micron to nano-devices, typically scaling of resonators such as cantilever beams.",

keywords = "EWI-9805, TST-uSPAM: micro Scanning Probe Array Memory, IR-67099, METIS-245711, TST-SMI: Formerly in EWI-SMI",

author = "C.K. Yang and {le F{\`e}bre}, A.J. and G. Pandraud and {van der Drift}, D. and P.J. French",

note = "IEEE 07TH8951; null ; Conference date: 08-07-2007 Through 12-07-2007",

year = "2007",

month = jul,

doi = "10.1109/IVNC.2007.4480937",

language = "Undefined",

isbn = "1-4244-1134-3",

publisher = "IEEE Computer Society",

pages = "72--73",

booktitle = "20th International Vacuum Nanoelectronics Conference",

address = "United States",

}

Yang, CK, le Fèbre, AJ, Pandraud, G, van der Drift, D & French, PJ 2007, Field Emission for resonance sensing in MEMS/NEMS. in 20th International Vacuum Nanoelectronics Conference. IEEE Computer Society, Los Alamitos, pp. 72-73, 2007 IEEE 20th International Vacuum Nanoelectronics Conference, IVNC 2007, Chicago, United States, 8/07/07. https://doi.org/10.1109/IVNC.2007.4480937

TY - GEN

T1 - Field Emission for resonance sensing in MEMS/NEMS

AU - Yang, C.K.

AU - le Fèbre, A.J.

AU - Pandraud, G.

AU - van der Drift, D.

AU - French, P.J.

N1 - Conference code: 20

PY - 2007/7

Y1 - 2007/7

N2 - In the past decades, there is a considerable interest in the sensor community to move from micron to nano-devices, typically scaling of resonators such as cantilever beams.

AB - In the past decades, there is a considerable interest in the sensor community to move from micron to nano-devices, typically scaling of resonators such as cantilever beams.

KW - EWI-9805

KW - TST-uSPAM: micro Scanning Probe Array Memory

KW - IR-67099

KW - METIS-245711

KW - TST-SMI: Formerly in EWI-SMI

U2 - 10.1109/IVNC.2007.4480937

DO - 10.1109/IVNC.2007.4480937

M3 - Conference contribution

SN - 1-4244-1134-3

SP - 72

EP - 73

BT - 20th International Vacuum Nanoelectronics Conference

PB - IEEE Computer Society

CY - Los Alamitos

Y2 - 8 July 2007 through 12 July 2007

ER -