Fine tuning the roughness of powder blasted surfaces

H. Wensink, Stefan Schlautmann, M.H. Goedbloed, Michael Curt Elwenspoek

    Research output: Contribution to journalArticleAcademicpeer-review

    27 Citations (Scopus)

    Abstract

    Powder blasting (abrasive jet machining) has recently been introduced as a bulk-micromachining technique for brittle materials. The surface roughness that is created with this technique is much higher (with a value of Ra between 1-2.5 μm) compared to general micromachining techniques. In this paper we study the roughness of powder blasted glass surfaces, and show how it depends on the process parameters. The roughness can also be changed after blasting by HF etching or by using a high-temperature anneal step. Roughness measurements and scanning electron microscopy images show the quantitative and qualitative changes in roughness. These post-processes will allow us to investigate the influence of surface roughness on the microsystem performance in future research.
    Original languageUndefined
    Pages (from-to)616-620
    Number of pages5
    JournalJournal of micromechanics and microengineering
    Volume12
    Issue number5
    DOIs
    Publication statusPublished - Sep 2002

    Keywords

    • EWI-12703
    • IR-43290
    • METIS-206300

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