| Original language | Undefined |
|---|---|
| Title of host publication | Proceedings Micromachined Devices and Components IV |
| Publisher | SPIE |
| Pages | 424-430 |
| DOIs | |
| Publication status | Published - 20 Sep 1998 |
| Event | Micromachined Devices and Components IV 1998 - Santa Clara, United States Duration: 20 Sep 1998 → 22 Sep 1998 |
Publication series
| Name | |
|---|---|
| Volume | 3514 |
| ISSN (Print) | 0277-786X |
Conference
| Conference | Micromachined Devices and Components IV 1998 |
|---|---|
| Country | United States |
| City | Santa Clara |
| Period | 20/09/98 → 22/09/98 |
Keywords
- METIS-312797
Cite this
Wensink, H., de Boer, M. J., Wiegerink, R. J., Zwijze, A. F., & Elwenspoek, M. C. (1998). First micromachined silicon load cell for loads up to 1000 kg. In Proceedings Micromachined Devices and Components IV (pp. 424-430). SPIE. https://doi.org/10.1117/12.323918
@inproceedings{8e65bf63bbea4ac8ab7404a024930a76,
title = "First micromachined silicon load cell for loads up to 1000 kg",
keywords = "METIS-312797",
author = "H. Wensink and {de Boer}, {Meint J.} and Wiegerink, {Remco J.} and A.F. Zwijze and Elwenspoek, {Michael Curt}",
year = "1998",
month = "9",
day = "20",
doi = "10.1117/12.323918",
language = "Undefined",
publisher = "SPIE",
pages = "424--430",
booktitle = "Proceedings Micromachined Devices and Components IV",
address = "United States",
}
Wensink, H, de Boer, MJ, Wiegerink, RJ, Zwijze, AF & Elwenspoek, MC 1998, First micromachined silicon load cell for loads up to 1000 kg. in Proceedings Micromachined Devices and Components IV. SPIE, pp. 424-430, Micromachined Devices and Components IV 1998, Santa Clara, United States, 20/09/98. https://doi.org/10.1117/12.323918
First micromachined silicon load cell for loads up to 1000 kg. / Wensink, H.; de Boer, Meint J.; Wiegerink, Remco J.; Zwijze, A.F.; Elwenspoek, Michael Curt.
Proceedings Micromachined Devices and Components IV. SPIE, 1998. p. 424-430.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review
TY - GEN
T1 - First micromachined silicon load cell for loads up to 1000 kg
AU - Wensink, H.
AU - de Boer, Meint J.
AU - Wiegerink, Remco J.
AU - Zwijze, A.F.
AU - Elwenspoek, Michael Curt
PY - 1998/9/20
Y1 - 1998/9/20
KW - METIS-312797
U2 - 10.1117/12.323918
DO - 10.1117/12.323918
M3 - Conference contribution
SP - 424
EP - 430
BT - Proceedings Micromachined Devices and Components IV
PB - SPIE
ER -
Wensink H, de Boer MJ, Wiegerink RJ, Zwijze AF, Elwenspoek MC. First micromachined silicon load cell for loads up to 1000 kg. In Proceedings Micromachined Devices and Components IV. SPIE. 1998. p. 424-430 https://doi.org/10.1117/12.323918