@inproceedings{8e65bf63bbea4ac8ab7404a024930a76,
title = "First micromachined silicon load cell for loads up to 1000 kg",
author = "Henk Wensink and {de Boer}, {Meint J.} and Wiegerink, {Remco J.} and Zwijze, {Robert A.F.} and Elwenspoek, {Miko C.}",
year = "1998",
month = sep,
day = "20",
doi = "10.1117/12.323918",
language = "English",
series = "Proceedings of SPIE",
publisher = "SPIE",
pages = "424--430",
editor = "French, {Patrick J.} and {Kevin H.}, {Kevin H.}",
booktitle = "Proceedings Micromachined Devices and Components IV",
address = "United States",
note = "Micromachined Devices and Components IV 1998 ; Conference date: 20-09-1998 Through 22-09-1998",
}