First micromachined silicon load cell for loads up to 1000 kg

H. Wensink, Meint J. de Boer, Remco J. Wiegerink, A.F. Zwijze, Michael Curt Elwenspoek

    Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

    11 Citations (Scopus)
    66 Downloads (Pure)
    Original languageUndefined
    Title of host publicationProceedings Micromachined Devices and Components IV
    PublisherSPIE
    Pages424-430
    DOIs
    Publication statusPublished - 20 Sep 1998
    EventMicromachined Devices and Components IV 1998 - Santa Clara, United States
    Duration: 20 Sep 1998 → 22 Sep 1998

    Publication series

    Name
    Volume3514
    ISSN (Print)0277-786X

    Conference

    ConferenceMicromachined Devices and Components IV 1998
    CountryUnited States
    CitySanta Clara
    Period20/09/98 → 22/09/98

    Keywords

    • METIS-312797

    Access to Document

    • 424_1Final published version, 2.75 MB

      Cite this

      Wensink, H., de Boer, M. J., Wiegerink, R. J., Zwijze, A. F., & Elwenspoek, M. C. (1998). First micromachined silicon load cell for loads up to 1000 kg. In Proceedings Micromachined Devices and Components IV (pp. 424-430). SPIE. https://doi.org/10.1117/12.323918