First micromachined silicon load cell for loads up to 1000 kg

H. Wensink, Meint J. de Boer, Remco J. Wiegerink, A.F. Zwijze, Michael Curt Elwenspoek

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    11 Citations (Scopus)
    52 Downloads (Pure)
    Original languageUndefined
    Title of host publicationProceedings Micromachined Devices and Components IV
    PublisherSPIE
    Pages424-430
    DOIs
    Publication statusPublished - 20 Sep 1998
    EventMicromachined Devices and Components IV 1998 - Santa Clara, United States
    Duration: 20 Sep 199822 Sep 1998

    Publication series

    Name
    Volume3514
    ISSN (Print)0277-786X

    Conference

    ConferenceMicromachined Devices and Components IV 1998
    CountryUnited States
    CitySanta Clara
    Period20/09/9822/09/98

    Keywords

    • METIS-312797

    Cite this

    Wensink, H., de Boer, M. J., Wiegerink, R. J., Zwijze, A. F., & Elwenspoek, M. C. (1998). First micromachined silicon load cell for loads up to 1000 kg. In Proceedings Micromachined Devices and Components IV (pp. 424-430). SPIE. https://doi.org/10.1117/12.323918
    Wensink, H. ; de Boer, Meint J. ; Wiegerink, Remco J. ; Zwijze, A.F. ; Elwenspoek, Michael Curt. / First micromachined silicon load cell for loads up to 1000 kg. Proceedings Micromachined Devices and Components IV. SPIE, 1998. pp. 424-430
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    title = "First micromachined silicon load cell for loads up to 1000 kg",
    keywords = "METIS-312797",
    author = "H. Wensink and {de Boer}, {Meint J.} and Wiegerink, {Remco J.} and A.F. Zwijze and Elwenspoek, {Michael Curt}",
    year = "1998",
    month = "9",
    day = "20",
    doi = "10.1117/12.323918",
    language = "Undefined",
    publisher = "SPIE",
    pages = "424--430",
    booktitle = "Proceedings Micromachined Devices and Components IV",
    address = "United States",

    }

    Wensink, H, de Boer, MJ, Wiegerink, RJ, Zwijze, AF & Elwenspoek, MC 1998, First micromachined silicon load cell for loads up to 1000 kg. in Proceedings Micromachined Devices and Components IV. SPIE, pp. 424-430, Micromachined Devices and Components IV 1998, Santa Clara, United States, 20/09/98. https://doi.org/10.1117/12.323918

    First micromachined silicon load cell for loads up to 1000 kg. / Wensink, H.; de Boer, Meint J.; Wiegerink, Remco J.; Zwijze, A.F.; Elwenspoek, Michael Curt.

    Proceedings Micromachined Devices and Components IV. SPIE, 1998. p. 424-430.

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    TY - GEN

    T1 - First micromachined silicon load cell for loads up to 1000 kg

    AU - Wensink, H.

    AU - de Boer, Meint J.

    AU - Wiegerink, Remco J.

    AU - Zwijze, A.F.

    AU - Elwenspoek, Michael Curt

    PY - 1998/9/20

    Y1 - 1998/9/20

    KW - METIS-312797

    U2 - 10.1117/12.323918

    DO - 10.1117/12.323918

    M3 - Conference contribution

    SP - 424

    EP - 430

    BT - Proceedings Micromachined Devices and Components IV

    PB - SPIE

    ER -

    Wensink H, de Boer MJ, Wiegerink RJ, Zwijze AF, Elwenspoek MC. First micromachined silicon load cell for loads up to 1000 kg. In Proceedings Micromachined Devices and Components IV. SPIE. 1998. p. 424-430 https://doi.org/10.1117/12.323918