First micromachined silicon load cell for loads up to 1000 kg

H. Wensink; Meint J. de Boer; Remco J. Wiegerink; A.F. Zwijze; Michael Curt Elwenspoek

doi:10.1117/12.323918

First micromachined silicon load cell for loads up to 1000 kg

H. Wensink, Meint J. de Boer, Remco J. Wiegerink, A.F. Zwijze, Michael Curt Elwenspoek

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

11 Citations (Scopus)

143 Downloads (Pure)

Original language	Undefined
Title of host publication	Proceedings Micromachined Devices and Components IV
Publisher	SPIE
Pages	424-430
DOIs	https://doi.org/10.1117/12.323918
Publication status	Published - 20 Sep 1998
Event	Micromachined Devices and Components IV 1998 - Santa Clara, United States Duration: 20 Sep 1998 → 22 Sep 1998

Publication series

Name
Volume	3514
ISSN (Print)	0277-786X

Conference

Conference	Micromachined Devices and Components IV 1998
Country/Territory	United States
City	Santa Clara
Period	20/09/98 → 22/09/98

Keywords

METIS-312797

Access to Document

10.1117/12.323918

424_1Final published version, 2.75 MB

Cite this

@inproceedings{8e65bf63bbea4ac8ab7404a024930a76,

title = "First micromachined silicon load cell for loads up to 1000 kg",

keywords = "METIS-312797",

author = "H. Wensink and {de Boer}, {Meint J.} and Wiegerink, {Remco J.} and A.F. Zwijze and Elwenspoek, {Michael Curt}",

year = "1998",

month = sep,

day = "20",

doi = "10.1117/12.323918",

language = "Undefined",

publisher = "SPIE",

pages = "424--430",

booktitle = "Proceedings Micromachined Devices and Components IV",

address = "United States",

note = "null ; Conference date: 20-09-1998 Through 22-09-1998",

}

TY - GEN

T1 - First micromachined silicon load cell for loads up to 1000 kg

AU - Wensink, H.

AU - de Boer, Meint J.

AU - Wiegerink, Remco J.

AU - Zwijze, A.F.

AU - Elwenspoek, Michael Curt

PY - 1998/9/20

Y1 - 1998/9/20

KW - METIS-312797

U2 - 10.1117/12.323918

DO - 10.1117/12.323918

M3 - Conference contribution

SP - 424

EP - 430

BT - Proceedings Micromachined Devices and Components IV

PB - SPIE

Y2 - 20 September 1998 through 22 September 1998

ER -