@inproceedings{8e65bf63bbea4ac8ab7404a024930a76,
title = "First micromachined silicon load cell for loads up to 1000 kg",
keywords = "METIS-312797",
author = "H. Wensink and {de Boer}, {Meint J.} and Wiegerink, {Remco J.} and A.F. Zwijze and Elwenspoek, {Michael Curt}",
year = "1998",
month = sep,
day = "20",
doi = "10.1117/12.323918",
language = "Undefined",
publisher = "SPIE",
pages = "424--430",
booktitle = "Proceedings Micromachined Devices and Components IV",
address = "United States",
note = "null ; Conference date: 20-09-1998 Through 22-09-1998",
}