First micromachined silicon load cell for loads up to 1000 kg

Henk Wensink; Meint J. de Boer; Remco J. Wiegerink; Robert A.F. Zwijze; Miko C. Elwenspoek

doi:10.1117/12.323918

First micromachined silicon load cell for loads up to 1000 kg

Henk Wensink
, Meint J. de Boer
, Remco J. Wiegerink
, Robert A.F. Zwijze
, Miko C. Elwenspoek

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

11 Citations (Scopus)

340 Downloads (Pure)

Original language	English
Title of host publication	Proceedings Micromachined Devices and Components IV
Editors	Patrick J. French, Kevin H. Kevin H.
Publisher	SPIE
Pages	424-430
DOIs	https://doi.org/10.1117/12.323918
Publication status	Published - 20 Sept 1998
Event	Micromachined Devices and Components IV 1998 - Santa Clara, United States Duration: 20 Sept 1998 → 22 Sept 1998

Publication series

Name	Proceedings of SPIE
Publisher	SPIE
Volume	3514
ISSN (Print)	0277-786X

Conference

Conference	Micromachined Devices and Components IV 1998
Country/Territory	United States
City	Santa Clara
Period	20/09/98 → 22/09/98

Access to Document

10.1117/12.323918

ArticleFinal published version, 2.75 MB

Cite this

@inproceedings{8e65bf63bbea4ac8ab7404a024930a76,

title = "First micromachined silicon load cell for loads up to 1000 kg",

author = "Henk Wensink and \{de Boer\}, \{Meint J.\} and Wiegerink, \{Remco J.\} and Zwijze, \{Robert A.F.\} and Elwenspoek, \{Miko C.\}",

year = "1998",

month = sep,

day = "20",

doi = "10.1117/12.323918",

language = "English",

series = "Proceedings of SPIE",

publisher = "SPIE",

pages = "424--430",

editor = "French, \{Patrick J.\} and \{Kevin H.\}, \{Kevin H.\}",

booktitle = "Proceedings Micromachined Devices and Components IV",

address = "United States",

note = "Micromachined Devices and Components IV 1998 ; Conference date: 20-09-1998 Through 22-09-1998",

}

Wensink, H, de Boer, MJ, Wiegerink, RJ, Zwijze, RAF & Elwenspoek, MC 1998, First micromachined silicon load cell for loads up to 1000 kg. in PJ French & KH Kevin H. (eds), Proceedings Micromachined Devices and Components IV. Proceedings of SPIE, vol. 3514, SPIE, pp. 424-430, Micromachined Devices and Components IV 1998, Santa Clara, California, United States, 20/09/98. https://doi.org/10.1117/12.323918

First micromachined silicon load cell for loads up to 1000 kg. / Wensink, Henk; de Boer, Meint J.; Wiegerink, Remco J. et al.
Proceedings Micromachined Devices and Components IV. ed. / Patrick J. French; Kevin H. Kevin H. SPIE, 1998. p. 424-430 (Proceedings of SPIE; Vol. 3514).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - First micromachined silicon load cell for loads up to 1000 kg

AU - Wensink, Henk

AU - de Boer, Meint J.

AU - Wiegerink, Remco J.

AU - Zwijze, Robert A.F.

AU - Elwenspoek, Miko C.

PY - 1998/9/20

Y1 - 1998/9/20

U2 - 10.1117/12.323918

DO - 10.1117/12.323918

M3 - Conference contribution

T3 - Proceedings of SPIE

SP - 424

EP - 430

BT - Proceedings Micromachined Devices and Components IV

A2 - French, Patrick J.

A2 - Kevin H., Kevin H.

PB - SPIE

T2 - Micromachined Devices and Components IV 1998

Y2 - 20 September 1998 through 22 September 1998

ER -