Fitting of Rocking Curves from Ion-Implanted Semiconductors

J.G.E. Klappe, P.F. Fewster

    Research output: Contribution to journalArticleAcademicpeer-review

    47 Citations (Scopus)
    Original languageUndefined
    Pages (from-to)103-110
    Number of pages8
    JournalJournal of applied crystallography
    Volume27
    Issue numberMW746
    Publication statusPublished - 1994

    Keywords

    • METIS-111610

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