Fitting of Rocking Curves from Ion-Implanted Semiconductors

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Original language	Undefined
Pages (from-to)	103-110
Number of pages	8
Journal	Journal of applied crystallography
Volume	27
Issue number	MW746
Publication status	Published - 1994

Keywords

@article{b8a097106f7644a0b079cb4a71c74dfd,

title = "Fitting of Rocking Curves from Ion-Implanted Semiconductors",

keywords = "METIS-111610",

author = "J.G.E. Klappe and P.F. Fewster",

year = "1994",

language = "Undefined",

volume = "27",

pages = "103--110",

journal = "Journal of applied crystallography",

issn = "0021-8898",

publisher = "International Union of Crystallography",

number = "MW746",

}