Flash release - an alternative for releasing complex MEMS devices

S. Deladi; G.J.M. Krijnen; M.C. Elwenspoek; V. Svetovoy

Flash release - an alternative for releasing complex MEMS devices

S. Deladi, G.J.M. Krijnen, M.C. Elwenspoek, V. Svetovoy

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Abstract

A novel time-saving and cost-effective release technique has been developed and is described. The physical nature of the process is explained in combination with experimental observations. The results of the flash release process are compared with those of freeze-drying and supercritical CO2 releasing. It is demonstrated that the new technique is not only simpler but it also gives better yield for long cantilevers. Furthermore, it is shown that the process can be used successfully for complex MEMS devices that consist of multiple-structural layers, but which do not contain membrane-like structures.

Original language	English
Title of host publication	Design, Test, Integration and Packaging of MEMS/MOEMS 2004
Subtitle of host publication	12-14 May 2004, Cannes, France
Editors	Bernard Courtois, Masayoshi Esashi, Adrian Ionescu, Jean Michel Karam, Jan Korvink, Karen Markus
Place of Publication	Grenoble
Publisher	TIMA Laboratory
Pages	343-348
ISBN (Print)	2-84813-026-1
Publication status	Published - 2004
Event	2004 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2004 - Cannes, France Duration: 12 May 2004 → 14 May 2004

Conference

Conference	2004 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2004
Abbreviated title	DTIP
Country/Territory	France
City	Cannes
Period	12/05/04 → 14/05/04

Cite this

Deladi, S. ; Krijnen, G.J.M. ; Elwenspoek, M.C. et al. / Flash release - an alternative for releasing complex MEMS devices. Design, Test, Integration and Packaging of MEMS/MOEMS 2004: 12-14 May 2004, Cannes, France. editor / Bernard Courtois ; Masayoshi Esashi ; Adrian Ionescu ; Jean Michel Karam ; Jan Korvink ; Karen Markus. Grenoble : TIMA Laboratory, 2004. pp. 343-348

@inproceedings{afd53f46ca5645f4962156971bb340e0,

title = "Flash release - an alternative for releasing complex MEMS devices",

abstract = "A novel time-saving and cost-effective release technique has been developed and is described. The physical nature of the process is explained in combination with experimental observations. The results of the flash release process are compared with those of freeze-drying and supercritical CO2 releasing. It is demonstrated that the new technique is not only simpler but it also gives better yield for long cantilevers. Furthermore, it is shown that the process can be used successfully for complex MEMS devices that consist of multiple-structural layers, but which do not contain membrane-like structures.",

author = "S. Deladi and G.J.M. Krijnen and M.C. Elwenspoek and V. Svetovoy",

year = "2004",

language = "English",

isbn = "2-84813-026-1",

pages = "343--348",

editor = "Bernard Courtois and Masayoshi Esashi and Adrian Ionescu and Karam, {Jean Michel} and Jan Korvink and Karen Markus",

booktitle = "Design, Test, Integration and Packaging of MEMS/MOEMS 2004",

publisher = "TIMA Laboratory",

note = "2004 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2004, DTIP ; Conference date: 12-05-2004 Through 14-05-2004",

}

Deladi, S, Krijnen, GJM, Elwenspoek, MC & Svetovoy, V 2004, Flash release - an alternative for releasing complex MEMS devices. in B Courtois, M Esashi, A Ionescu, JM Karam, J Korvink & K Markus (eds), Design, Test, Integration and Packaging of MEMS/MOEMS 2004: 12-14 May 2004, Cannes, France. TIMA Laboratory, Grenoble, pp. 343-348, 2004 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2004, Cannes, France, 12/05/04.

Flash release - an alternative for releasing complex MEMS devices. / Deladi, S.; Krijnen, G.J.M.; Elwenspoek, M.C. et al.
Design, Test, Integration and Packaging of MEMS/MOEMS 2004: 12-14 May 2004, Cannes, France. ed. / Bernard Courtois; Masayoshi Esashi; Adrian Ionescu; Jean Michel Karam; Jan Korvink; Karen Markus. Grenoble: TIMA Laboratory, 2004. p. 343-348.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Flash release - an alternative for releasing complex MEMS devices

AU - Deladi, S.

AU - Krijnen, G.J.M.

AU - Elwenspoek, M.C.

AU - Svetovoy, V.

PY - 2004

Y1 - 2004

N2 - A novel time-saving and cost-effective release technique has been developed and is described. The physical nature of the process is explained in combination with experimental observations. The results of the flash release process are compared with those of freeze-drying and supercritical CO2 releasing. It is demonstrated that the new technique is not only simpler but it also gives better yield for long cantilevers. Furthermore, it is shown that the process can be used successfully for complex MEMS devices that consist of multiple-structural layers, but which do not contain membrane-like structures.

AB - A novel time-saving and cost-effective release technique has been developed and is described. The physical nature of the process is explained in combination with experimental observations. The results of the flash release process are compared with those of freeze-drying and supercritical CO2 releasing. It is demonstrated that the new technique is not only simpler but it also gives better yield for long cantilevers. Furthermore, it is shown that the process can be used successfully for complex MEMS devices that consist of multiple-structural layers, but which do not contain membrane-like structures.

M3 - Conference contribution

SN - 2-84813-026-1

SP - 343

EP - 348

BT - Design, Test, Integration and Packaging of MEMS/MOEMS 2004

A2 - Courtois, Bernard

A2 - Esashi, Masayoshi

A2 - Ionescu, Adrian

A2 - Karam, Jean Michel

A2 - Korvink, Jan

A2 - Markus, Karen

PB - TIMA Laboratory

CY - Grenoble

T2 - 2004 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2004

Y2 - 12 May 2004 through 14 May 2004

ER -

Flash release - an alternative for releasing complex MEMS devices

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