Flash release - an alternative for releasing complex MEMS devices

S. Deladi, V. Svetovoy, G.J.M. Krijnen, M.C. Elwenspoek

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    Abstract

    A novel time-saving and cost-effective release technique has been developed and is described. The physical nature of the process is explained in combination with experimental observations. The results of the flash release process are compared with those of freeze-drying and supercritical CO2 releasing. It is demonstrated that the new technique is not only simpler but it also gives better yield for long cantilevers. Furthermore, it is shown that the process can be used successfully for complex MEMS devices that consist of multiple-structural layers, but which do not contain membrane-like structures.
    Original languageEnglish
    Pages (from-to)1659-1664
    Number of pages6
    JournalJournal of micromechanics and microengineering
    Volume14
    Issue number12
    DOIs
    Publication statusPublished - 26 Aug 2004

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