Flash release - an alternative for releasing complex mems devices

Research output: Contribution to journalArticleAcademicpeer-review

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Abstract

A novel time-saving and cost-effective release technique has been developed and is described. The physical nature of the process is explained in combination with experimental observations. The results of the flash release process are compared with those of freeze-drying and supercritical CO2 releasing. It is demonstrated that the new technique is not only simpler but it also gives better yield for long cantilevers. Furthermore, it is shown that the process can be used successfully for complex MEMS devices that consist of multiple-structural layers, but which do not contain membrane-like structures.
Original languageUndefined
Pages (from-to)1659-1664
Number of pages6
JournalJournal of micromechanics and microengineering
Volume14
Issue number14
DOIs
Publication statusPublished - 26 Aug 2004

Keywords

  • METIS-219981
  • IR-48481
  • EWI-9936

Cite this

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title = "Flash release - an alternative for releasing complex mems devices",
abstract = "A novel time-saving and cost-effective release technique has been developed and is described. The physical nature of the process is explained in combination with experimental observations. The results of the flash release process are compared with those of freeze-drying and supercritical CO2 releasing. It is demonstrated that the new technique is not only simpler but it also gives better yield for long cantilevers. Furthermore, it is shown that the process can be used successfully for complex MEMS devices that consist of multiple-structural layers, but which do not contain membrane-like structures.",
keywords = "METIS-219981, IR-48481, EWI-9936",
author = "S. Deladi and Vitaly Svetovoy and Krijnen, {Gijsbertus J.M.} and Elwenspoek, {Michael Curt}",
year = "2004",
month = "8",
day = "26",
doi = "10.1088/0960-1317/14/12/009",
language = "Undefined",
volume = "14",
pages = "1659--1664",
journal = "Journal of micromechanics and microengineering",
issn = "0960-1317",
publisher = "IOP Publishing Ltd.",
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}

Flash release - an alternative for releasing complex mems devices. / Deladi, S.; Svetovoy, Vitaly; Krijnen, Gijsbertus J.M.; Elwenspoek, Michael Curt.

In: Journal of micromechanics and microengineering, Vol. 14, No. 14, 26.08.2004, p. 1659-1664.

Research output: Contribution to journalArticleAcademicpeer-review

TY - JOUR

T1 - Flash release - an alternative for releasing complex mems devices

AU - Deladi, S.

AU - Svetovoy, Vitaly

AU - Krijnen, Gijsbertus J.M.

AU - Elwenspoek, Michael Curt

PY - 2004/8/26

Y1 - 2004/8/26

N2 - A novel time-saving and cost-effective release technique has been developed and is described. The physical nature of the process is explained in combination with experimental observations. The results of the flash release process are compared with those of freeze-drying and supercritical CO2 releasing. It is demonstrated that the new technique is not only simpler but it also gives better yield for long cantilevers. Furthermore, it is shown that the process can be used successfully for complex MEMS devices that consist of multiple-structural layers, but which do not contain membrane-like structures.

AB - A novel time-saving and cost-effective release technique has been developed and is described. The physical nature of the process is explained in combination with experimental observations. The results of the flash release process are compared with those of freeze-drying and supercritical CO2 releasing. It is demonstrated that the new technique is not only simpler but it also gives better yield for long cantilevers. Furthermore, it is shown that the process can be used successfully for complex MEMS devices that consist of multiple-structural layers, but which do not contain membrane-like structures.

KW - METIS-219981

KW - IR-48481

KW - EWI-9936

U2 - 10.1088/0960-1317/14/12/009

DO - 10.1088/0960-1317/14/12/009

M3 - Article

VL - 14

SP - 1659

EP - 1664

JO - Journal of micromechanics and microengineering

JF - Journal of micromechanics and microengineering

SN - 0960-1317

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