Flash release - an alternative for releasing complex MEMS devices

S. Deladi; V. Svetovoy; G.J.M. Krijnen; M.C. Elwenspoek

doi:10.1088/0960-1317/14/12/009

Flash release - an alternative for releasing complex MEMS devices

S. Deladi, V. Svetovoy, G.J.M. Krijnen, M.C. Elwenspoek

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Abstract

A novel time-saving and cost-effective release technique has been developed and is described. The physical nature of the process is explained in combination with experimental observations. The results of the flash release process are compared with those of freeze-drying and supercritical CO2 releasing. It is demonstrated that the new technique is not only simpler but it also gives better yield for long cantilevers. Furthermore, it is shown that the process can be used successfully for complex MEMS devices that consist of multiple-structural layers, but which do not contain membrane-like structures.

Original language	English
Pages (from-to)	1659-1664
Number of pages	6
Journal	Journal of micromechanics and microengineering
Volume	14
Issue number	12
DOIs	https://doi.org/10.1088/0960-1317/14/12/009
Publication status	Published - 26 Aug 2004

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@article{5617b864e51a44b697ebb1c907ac2517,

title = "Flash release - an alternative for releasing complex MEMS devices",

abstract = "A novel time-saving and cost-effective release technique has been developed and is described. The physical nature of the process is explained in combination with experimental observations. The results of the flash release process are compared with those of freeze-drying and supercritical CO2 releasing. It is demonstrated that the new technique is not only simpler but it also gives better yield for long cantilevers. Furthermore, it is shown that the process can be used successfully for complex MEMS devices that consist of multiple-structural layers, but which do not contain membrane-like structures.",

author = "S. Deladi and V. Svetovoy and G.J.M. Krijnen and M.C. Elwenspoek",

year = "2004",

month = aug,

day = "26",

doi = "10.1088/0960-1317/14/12/009",

language = "English",

volume = "14",

pages = "1659--1664",

journal = "Journal of micromechanics and microengineering",

issn = "0960-1317",

publisher = "Institute of Physics (IOP)",

number = "12",

}

TY - JOUR

T1 - Flash release - an alternative for releasing complex MEMS devices

AU - Deladi, S.

AU - Svetovoy, V.

AU - Krijnen, G.J.M.

AU - Elwenspoek, M.C.

PY - 2004/8/26

Y1 - 2004/8/26

N2 - A novel time-saving and cost-effective release technique has been developed and is described. The physical nature of the process is explained in combination with experimental observations. The results of the flash release process are compared with those of freeze-drying and supercritical CO2 releasing. It is demonstrated that the new technique is not only simpler but it also gives better yield for long cantilevers. Furthermore, it is shown that the process can be used successfully for complex MEMS devices that consist of multiple-structural layers, but which do not contain membrane-like structures.

AB - A novel time-saving and cost-effective release technique has been developed and is described. The physical nature of the process is explained in combination with experimental observations. The results of the flash release process are compared with those of freeze-drying and supercritical CO2 releasing. It is demonstrated that the new technique is not only simpler but it also gives better yield for long cantilevers. Furthermore, it is shown that the process can be used successfully for complex MEMS devices that consist of multiple-structural layers, but which do not contain membrane-like structures.

U2 - 10.1088/0960-1317/14/12/009

DO - 10.1088/0960-1317/14/12/009

M3 - Article

SN - 0960-1317

VL - 14

SP - 1659

EP - 1664

JO - Journal of micromechanics and microengineering

JF - Journal of micromechanics and microengineering

IS - 12

ER -

Flash release - an alternative for releasing complex MEMS devices

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