Flash release of a microtribosensor

S. Deladi, G.J.M. Krijnen, M.C. Elwenspoek

    Research output: Contribution to conferencePosterOther research output

    Original languageEnglish
    Publication statusPublished - 26 Nov 2003
    Event6th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE 2003 - Veldhoven, Netherlands
    Duration: 25 Nov 200326 Nov 2003
    Conference number: 6

    Conference

    Conference6th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE 2003
    Abbreviated titleSAFE
    CountryNetherlands
    CityVeldhoven
    Period25/11/0326/11/03

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