Flip-chip assembly of an integrated optical sensor

K. Worhoff, R.G. Heideman, M.J. Gilde, K. Blidegn, M. Heschel, H.H. van den Vlekkert

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    Abstract

    For enabling low cost mass production for photonic circuits, the application of flipchip technology creates huge expectations. We report on the results of a project, having the goal to demonstrate standard packaging technology in combination with integrated optics, entailing demands and limitations different from IC technology. Mainly fiber attachment, but also special features as sensor window accessibility at the top-side of the chip are prohibiting the positioning of the optical layer stack and solder pads at the same side of the silicon wafer. Therefore, feed through technology had to be included. Compatibility issues in combining feed through technology with integrated optics processing have been solved and the feasibility of feed-through metallization and flip-chip assembly in combination with an integrated optical sensor has been demonstrated.
    Original languageEnglish
    Title of host publicationProceedings 2004 Ninth Annual Symposium of the IEEE/LEOS Benelux Chapter
    Place of PublicationGhent, Belgium
    PublisherGhent University
    Pages25-28
    Number of pages4
    ISBN (Print)9076546061
    Publication statusPublished - 2 Dec 2004
    Event9th Annual Symposium IEEE/LEOS Benelux Chapter 2004 - Ghent, Belgium
    Duration: 2 Dec 20043 Dec 2004
    Conference number: 9

    Conference

    Conference9th Annual Symposium IEEE/LEOS Benelux Chapter 2004
    CountryBelgium
    CityGhent
    Period2/12/043/12/04

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  • Cite this

    Worhoff, K., Heideman, R. G., Gilde, M. J., Blidegn, K., Heschel, M., & van den Vlekkert, H. H. (2004). Flip-chip assembly of an integrated optical sensor. In Proceedings 2004 Ninth Annual Symposium of the IEEE/LEOS Benelux Chapter (pp. 25-28). Ghent, Belgium: Ghent University.