Theodorus S.J. Lammerink (Inventor), Marcel Dijkstra (Inventor), J. Haneveld (Inventor), Remco J. Wiegerink (Inventor)

    Research output: Patent

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    A flowmeter including a system chip with a silicon substrate provided on a carrier, in an opening whereof at least one silicon flow tube is provided for transporting a medium whose flow rate is to be measured, the tube having two ends that issue via a wall of the opening into channels coated with silicon nitride in the silicon substrate, wherein the flow tube forms part of a Coriolis flow sensor and/or a thermal flow sensor, and wherein the channels are preferably in communication through the carrier with connection lines to the external world.
    Original languageUndefined
    Patent numberUS7895905
    Priority date1/03/11
    Publication statusAccepted/In press - 1 Mar 2011


    • EWI-20140
    • METIS-279153
    • IR-76942

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