Flowmeter

Theodorus S.J. Lammerink; Marcel Dijkstra; J. Haneveld; Remco J. Wiegerink

Flowmeter

Theodorus S.J. Lammerink (Inventor), Marcel Dijkstra (Inventor), J. Haneveld (Inventor), Remco J. Wiegerink (Inventor)

Research output: Patent

45 Downloads (Pure)

Abstract

A flowmeter including a system chip with a silicon substrate provided on a carrier, in an opening whereof at least one silicon flow tube is provided for transporting a medium whose flow rate is to be measured, the tube having two ends that issue via a wall of the opening into channels coated with silicon nitride in the silicon substrate, wherein the flow tube forms part of a Coriolis flow sensor and/or a thermal flow sensor, and wherein the channels are preferably in communication through the carrier with connection lines to the external world.

Original language	Undefined
Patent number	US20080335045
Publication status	Submitted - 15 Dec 2008

Keywords

IR-76522
EWI-19905

Access to Document

http://v3.espacenet.com/publicationDetails/biblio?CC=US&NR=2009308177A1&KC=A1&FT=D&date=20091217&DB=EPODOC&locale=en_EP

Cite this

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AU - Dijkstra, Marcel

AU - Haneveld, J.

AU - Wiegerink, Remco J.

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AB - A flowmeter including a system chip with a silicon substrate provided on a carrier, in an opening whereof at least one silicon flow tube is provided for transporting a medium whose flow rate is to be measured, the tube having two ends that issue via a wall of the opening into channels coated with silicon nitride in the silicon substrate, wherein the flow tube forms part of a Coriolis flow sensor and/or a thermal flow sensor, and wherein the channels are preferably in communication through the carrier with connection lines to the external world.

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