Flowmeter

Theodorus S.J. Lammerink (Inventor), Marcel Dijkstra (Inventor), J. Haneveld (Inventor), Remco J. Wiegerink (Inventor)

    Research output: Patent

    13 Downloads (Pure)

    Abstract

    A flowmeter including a system chip with a silicon substrate provided on a carrier, in an opening whereof at least one silicon flow tube is provided for transporting a medium whose flow rate is to be measured, the tube having two ends that issue via a wall of the opening into channels coated with silicon nitride in the silicon substrate, wherein the flow tube forms part of a Coriolis flow sensor and/or a thermal flow sensor, and wherein the channels are preferably in communication through the carrier with connection lines to the external world.
    Original languageUndefined
    Patent numberUS20080335045
    Publication statusSubmitted - 15 Dec 2008

    Keywords

    • IR-76522
    • EWI-19905

    Cite this

    Lammerink, T. S. J., Dijkstra, M., Haneveld, J., & Wiegerink, R. J. (2008). Flowmeter. Manuscript submitted for publication. (Patent No. US20080335045).
    Lammerink, Theodorus S.J. (Inventor) ; Dijkstra, Marcel (Inventor) ; Haneveld, J. (Inventor) ; Wiegerink, Remco J. (Inventor). / Flowmeter. Patent No.: US20080335045.
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    title = "Flowmeter",
    abstract = "A flowmeter including a system chip with a silicon substrate provided on a carrier, in an opening whereof at least one silicon flow tube is provided for transporting a medium whose flow rate is to be measured, the tube having two ends that issue via a wall of the opening into channels coated with silicon nitride in the silicon substrate, wherein the flow tube forms part of a Coriolis flow sensor and/or a thermal flow sensor, and wherein the channels are preferably in communication through the carrier with connection lines to the external world.",
    keywords = "IR-76522, EWI-19905",
    author = "Lammerink, {Theodorus S.J.} and Marcel Dijkstra and J. Haneveld and Wiegerink, {Remco J.}",
    year = "2008",
    month = "12",
    day = "15",
    language = "Undefined",
    type = "Patent",
    note = "US20080335045",

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    Lammerink, TSJ, Dijkstra, M, Haneveld, J & Wiegerink, RJ 2008, Flowmeter, Patent No. US20080335045.

    Flowmeter. / Lammerink, Theodorus S.J. (Inventor); Dijkstra, Marcel (Inventor); Haneveld, J. (Inventor); Wiegerink, Remco J. (Inventor).

    Patent No.: US20080335045.

    Research output: Patent

    TY - PAT

    T1 - Flowmeter

    AU - Lammerink, Theodorus S.J.

    AU - Dijkstra, Marcel

    AU - Haneveld, J.

    AU - Wiegerink, Remco J.

    PY - 2008/12/15

    Y1 - 2008/12/15

    N2 - A flowmeter including a system chip with a silicon substrate provided on a carrier, in an opening whereof at least one silicon flow tube is provided for transporting a medium whose flow rate is to be measured, the tube having two ends that issue via a wall of the opening into channels coated with silicon nitride in the silicon substrate, wherein the flow tube forms part of a Coriolis flow sensor and/or a thermal flow sensor, and wherein the channels are preferably in communication through the carrier with connection lines to the external world.

    AB - A flowmeter including a system chip with a silicon substrate provided on a carrier, in an opening whereof at least one silicon flow tube is provided for transporting a medium whose flow rate is to be measured, the tube having two ends that issue via a wall of the opening into channels coated with silicon nitride in the silicon substrate, wherein the flow tube forms part of a Coriolis flow sensor and/or a thermal flow sensor, and wherein the channels are preferably in communication through the carrier with connection lines to the external world.

    KW - IR-76522

    KW - EWI-19905

    M3 - Patent

    M1 - US20080335045

    ER -

    Lammerink TSJ, Dijkstra M, Haneveld J, Wiegerink RJ, inventors. Flowmeter. US20080335045. 2008 Dec 15.