Flowmeter

Theodorus S.J. Lammerink; Marcel Dijkstra; J. Haneveld; Remco J. Wiegerink

Flowmeter

Theodorus S.J. Lammerink (Inventor), Marcel Dijkstra (Inventor), J. Haneveld (Inventor), Remco J. Wiegerink (Inventor)

Research output: Patent

63 Downloads (Pure)

Abstract

A flowmeter including a system chip with a silicon substrate provided on a carrier, in an opening whereof at least one silicon flow tube is provided for transporting a medium whose flow rate is to be measured, the tube having two ends that issue via a wall of the opening into channels coated with silicon nitride in the silicon substrate, wherein the flow tube forms part of a Coriolis flow sensor and/or a thermal flow sensor, and wherein the channels are preferably in communication through the carrier with connection lines to the external world.

Original language	Undefined
Patent number	US20080335045
Publication status	Submitted - 15 Dec 2008

Keywords

IR-76522
EWI-19905

Access to Document

http://v3.espacenet.com/publicationDetails/biblio?CC=US&NR=2009308177A1&KC=A1&FT=D&date=20091217&DB=EPODOC&locale=en_EP

Cite this

@misc{4c13c932255c462aae14ba81efae8b49,

title = "Flowmeter",

abstract = "A flowmeter including a system chip with a silicon substrate provided on a carrier, in an opening whereof at least one silicon flow tube is provided for transporting a medium whose flow rate is to be measured, the tube having two ends that issue via a wall of the opening into channels coated with silicon nitride in the silicon substrate, wherein the flow tube forms part of a Coriolis flow sensor and/or a thermal flow sensor, and wherein the channels are preferably in communication through the carrier with connection lines to the external world.",

keywords = "IR-76522, EWI-19905",

author = "Lammerink, {Theodorus S.J.} and Marcel Dijkstra and J. Haneveld and Wiegerink, {Remco J.}",

year = "2008",

month = dec,

day = "15",

language = "Undefined",

type = "Patent",

note = "US20080335045",

}

TY - PAT

T1 - Flowmeter

AU - Lammerink, Theodorus S.J.

AU - Dijkstra, Marcel

AU - Haneveld, J.

AU - Wiegerink, Remco J.

PY - 2008/12/15

Y1 - 2008/12/15

N2 - A flowmeter including a system chip with a silicon substrate provided on a carrier, in an opening whereof at least one silicon flow tube is provided for transporting a medium whose flow rate is to be measured, the tube having two ends that issue via a wall of the opening into channels coated with silicon nitride in the silicon substrate, wherein the flow tube forms part of a Coriolis flow sensor and/or a thermal flow sensor, and wherein the channels are preferably in communication through the carrier with connection lines to the external world.

AB - A flowmeter including a system chip with a silicon substrate provided on a carrier, in an opening whereof at least one silicon flow tube is provided for transporting a medium whose flow rate is to be measured, the tube having two ends that issue via a wall of the opening into channels coated with silicon nitride in the silicon substrate, wherein the flow tube forms part of a Coriolis flow sensor and/or a thermal flow sensor, and wherein the channels are preferably in communication through the carrier with connection lines to the external world.

KW - IR-76522

KW - EWI-19905

M3 - Patent

M1 - US20080335045

ER -