Flowmeter with silicon flow tube

Theodorus S.J. Lammerink (Inventor), Marcel Dijkstra (Inventor), J. Haneveld (Inventor), Joost Conrad Lötters (Inventor)

    Research output: Patent

    9 Downloads (Pure)


    A flowmeter comprising a system chip with a silicon substrate provided on a carrier, in an opening whereof at least one silicon flow tube is provided for transporting a medium whose flow rate is to be measured, said tube having two ends that issue via a wall of the opening into channels coated with silicon nitride in the silicon substrate, wherein the flow tube forms part of a Coriolis flow sensor and/or a thermal flow sensor, and wherein the channels are preferably in communication through the carrier with connection lines to the external world.
    Original languageUndefined
    Patent numberNL1034905
    Publication statusAccepted/In press - 14 Jul 2009


    • EWI-20139

    Cite this