Flowmeter with silicon flow tube

Theodorus S.J. Lammerink (Inventor), Marcel Dijkstra (Inventor), J. Haneveld (Inventor), Joost Conrad Lötters (Inventor)

    Research output: PatentProfessional

    8 Downloads (Pure)

    Abstract

    A flowmeter comprising a system chip with a silicon substrate provided on a carrier, in an opening whereof at least one silicon flow tube is provided for transporting a medium whose flow rate is to be measured, said tube having two ends that issue via a wall of the opening into channels coated with silicon nitride in the silicon substrate, wherein the flow tube forms part of a Coriolis flow sensor and/or a thermal flow sensor, and wherein the channels are preferably in communication through the carrier with connection lines to the external world.
    Original languageUndefined
    Patent numberNL1034905
    Publication statusAccepted/In press - 14 Jul 2009

    Keywords

    • EWI-20139

    Cite this

    Lammerink, T. S. J., Dijkstra, M., Haneveld, J., & Lötters, J. C. (Accepted/In press). Flowmeter with silicon flow tube. (Patent No. NL1034905).
    Lammerink, Theodorus S.J. (Inventor) ; Dijkstra, Marcel (Inventor) ; Haneveld, J. (Inventor) ; Lötters, Joost Conrad (Inventor). / Flowmeter with silicon flow tube. Patent No.: NL1034905.
    @misc{d7dfbe99378b43b5a541d0bc6e40a839,
    title = "Flowmeter with silicon flow tube",
    abstract = "A flowmeter comprising a system chip with a silicon substrate provided on a carrier, in an opening whereof at least one silicon flow tube is provided for transporting a medium whose flow rate is to be measured, said tube having two ends that issue via a wall of the opening into channels coated with silicon nitride in the silicon substrate, wherein the flow tube forms part of a Coriolis flow sensor and/or a thermal flow sensor, and wherein the channels are preferably in communication through the carrier with connection lines to the external world.",
    keywords = "EWI-20139",
    author = "Lammerink, {Theodorus S.J.} and Marcel Dijkstra and J. Haneveld and L{\"o}tters, {Joost Conrad}",
    year = "2009",
    month = "7",
    day = "14",
    language = "Undefined",
    type = "Patent",
    note = "NL1034905",

    }

    Lammerink, TSJ, Dijkstra, M, Haneveld, J & Lötters, JC 2009, Flowmeter with silicon flow tube, Patent No. NL1034905.

    Flowmeter with silicon flow tube. / Lammerink, Theodorus S.J. (Inventor); Dijkstra, Marcel (Inventor); Haneveld, J. (Inventor); Lötters, Joost Conrad (Inventor).

    Patent No.: NL1034905.

    Research output: PatentProfessional

    TY - PAT

    T1 - Flowmeter with silicon flow tube

    AU - Lammerink, Theodorus S.J.

    AU - Dijkstra, Marcel

    AU - Haneveld, J.

    AU - Lötters, Joost Conrad

    PY - 2009/7/14

    Y1 - 2009/7/14

    N2 - A flowmeter comprising a system chip with a silicon substrate provided on a carrier, in an opening whereof at least one silicon flow tube is provided for transporting a medium whose flow rate is to be measured, said tube having two ends that issue via a wall of the opening into channels coated with silicon nitride in the silicon substrate, wherein the flow tube forms part of a Coriolis flow sensor and/or a thermal flow sensor, and wherein the channels are preferably in communication through the carrier with connection lines to the external world.

    AB - A flowmeter comprising a system chip with a silicon substrate provided on a carrier, in an opening whereof at least one silicon flow tube is provided for transporting a medium whose flow rate is to be measured, said tube having two ends that issue via a wall of the opening into channels coated with silicon nitride in the silicon substrate, wherein the flow tube forms part of a Coriolis flow sensor and/or a thermal flow sensor, and wherein the channels are preferably in communication through the carrier with connection lines to the external world.

    KW - EWI-20139

    M3 - Patent

    M1 - NL1034905

    ER -

    Lammerink TSJ, Dijkstra M, Haneveld J, Lötters JC, inventors. Flowmeter with silicon flow tube. NL1034905. 2009 Jul 14.