Flowmeter with silicon flow tube

Theodorus S.J. Lammerink; Marcel Dijkstra; J. Haneveld; Joost Conrad Lötters

Flowmeter with silicon flow tube

Theodorus S.J. Lammerink (Inventor), Marcel Dijkstra (Inventor), J. Haneveld (Inventor), Joost Conrad Lötters (Inventor)

Research output: Patent

40 Downloads (Pure)

Abstract

A flowmeter comprising a system chip with a silicon substrate provided on a carrier, in an opening whereof at least one silicon flow tube is provided for transporting a medium whose flow rate is to be measured, said tube having two ends that issue via a wall of the opening into channels coated with silicon nitride in the silicon substrate, wherein the flow tube forms part of a Coriolis flow sensor and/or a thermal flow sensor, and wherein the channels are preferably in communication through the carrier with connection lines to the external world.

Original language	Undefined
Patent number	NL1034905
Publication status	Accepted/In press - 14 Jul 2009

Keywords

EWI-20139

Access to Document

NL1034905C2

http://worldwide.espacenet.com/publicationDetails/biblio?CC=NL&NR=1034905C2&KC=C2&FT=D&date=20090714&DB=EPODOC&locale=en_EP

Cite this

@misc{d7dfbe99378b43b5a541d0bc6e40a839,

title = "Flowmeter with silicon flow tube",

abstract = "A flowmeter comprising a system chip with a silicon substrate provided on a carrier, in an opening whereof at least one silicon flow tube is provided for transporting a medium whose flow rate is to be measured, said tube having two ends that issue via a wall of the opening into channels coated with silicon nitride in the silicon substrate, wherein the flow tube forms part of a Coriolis flow sensor and/or a thermal flow sensor, and wherein the channels are preferably in communication through the carrier with connection lines to the external world.",

keywords = "EWI-20139",

author = "Lammerink, {Theodorus S.J.} and Marcel Dijkstra and J. Haneveld and L{\"o}tters, {Joost Conrad}",

year = "2009",

month = jul,

day = "14",

language = "Undefined",

type = "Patent",

note = "NL1034905",

}

TY - PAT

T1 - Flowmeter with silicon flow tube

AU - Lammerink, Theodorus S.J.

AU - Dijkstra, Marcel

AU - Haneveld, J.

AU - Lötters, Joost Conrad

PY - 2009/7/14

Y1 - 2009/7/14

N2 - A flowmeter comprising a system chip with a silicon substrate provided on a carrier, in an opening whereof at least one silicon flow tube is provided for transporting a medium whose flow rate is to be measured, said tube having two ends that issue via a wall of the opening into channels coated with silicon nitride in the silicon substrate, wherein the flow tube forms part of a Coriolis flow sensor and/or a thermal flow sensor, and wherein the channels are preferably in communication through the carrier with connection lines to the external world.

AB - A flowmeter comprising a system chip with a silicon substrate provided on a carrier, in an opening whereof at least one silicon flow tube is provided for transporting a medium whose flow rate is to be measured, said tube having two ends that issue via a wall of the opening into channels coated with silicon nitride in the silicon substrate, wherein the flow tube forms part of a Coriolis flow sensor and/or a thermal flow sensor, and wherein the channels are preferably in communication through the carrier with connection lines to the external world.

KW - EWI-20139

M3 - Patent

M1 - NL1034905

ER -