Fluid control for micro total analysis systems

R.E. Oosterbroek, Theodorus S.J. Lammerink, Johan W. Berenschot, Albert van den Berg, Michael Curt Elwenspoek

    Research output: Other contributionOther research output

    Original languageUndefined
    Publication statusPublished - 17 Jun 1997

    Keywords

    • METIS-114700

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